Compact non-carrier vaporizer with piezo actuator.

A fast response piezo actuator control valve for low flow rates controls the liquid flow in the direct vicinity of the vaporization chamber.

The flow-controlled liquid is diffused through a mesh filter and heated in the vaporization chamber to achieve stable vaporization even at minute flow rates.

Small non-carrier vaporizer
Small non-carrier vaporizer


  • Non-Carrier Vaporization
  • Low flow vaporization
  • Close proximity valve structure
  • Space saving
  • Easy maintenance

Example of Use

Non-Carrier Vaporization of TEOS

The main disadvantage of non-carrier gas vaporization method using high-temperature MFC is that the low vaporization flow rate capacity.
Addressing this issue, Lintec’s original non-carrier gas vaporizer VU-3100 is capable of supplying non-carrier vaporization of TEOS: 5g/min (538SCCM) while being compact.

Specification Table

Max. temperatureMax TEOS vaporizationWetted materials
150℃5g/minSUS316L, PEEK®, Ni-Co, PTFE, Au