Compact non-carrier vaporizer with piezo actuator.
A fast response piezo actuator control valve for low flow rates controls the liquid flow in the direct vicinity of the vaporization chamber.
The flow-controlled liquid is diffused through a mesh filter and heated in the vaporization chamber to achieve stable vaporization even at minute flow rates.
Feature
- Non-Carrier Vaporization
- Low flow vaporization
- Close proximity valve structure
- Space saving
- Easy maintenance
Example of Use
Non-Carrier Vaporization of TEOS
The main disadvantage of non-carrier gas vaporization method using high-temperature MFC is that the low vaporization flow rate capacity.
Addressing this issue, Lintec’s original non-carrier gas vaporizer VU-3100 is capable of supplying non-carrier vaporization of TEOS: 5g/min (538SCCM) while being compact.
Specification Table
| Max. temperature | Max TEOS vaporization | Wetted materials |
|---|---|---|
| 150℃ | 5g/min | SUS316L, PEEK®, Ni-Co, PTFE, Au |