High performance mass flow controller for EtherCAT communication.

MC-5000C Series

High performance EtherCAT mass flow controller for semiconductor processes. It is compliant with SEMI standards and can be controlled by using the EtherCAT communication, which is used to speed up the transport system of semiconductor manufacturing equipment.

This MFC has a full metal seal, which is a requirement in most semiconductor manufacturing processes, and Lintec’s unique ambient temperature compensated flow rate sensor; liquefied gas operations are also possible with the “liquified gas” option.

EtherCAT® Mass Flow Controller
MC-5000C Series


  • Accuracy ±1% S.P.
  • Metal seal
  • Clean (zero particle structure)
  • Ambient temperature sensor
  • EtherCAT communication


  • Micro Flow F.S.
  • Compatible with liquefied gas
  • Wide range

Example of Use

Communication Unification of EtherCAT Communication Devices

EtherCAT communication (digital interface) is increasingly used in semiconductor manufacturing equipment for high-speed control of robot arms and other transport systems. 65,536 nodes are available for EtherCAT communication, enabling unification of all measurement and motion elements of the MFC with EtherCAT communication.

Specification Table

Flow rate in Nitrogen(Full scale)5~5,000SCCM~20SLM~50SLM~150SLM~200SLM~300SLM
Flow rate control range2 ~ 100% F.S.
Accuracy100~25% F.S. ±1.0%S.P.
25%~2% F.S. ±0.25% F.S.
100~35% F.S. ±1.0%S.P.
35%~2% F.S. ±0.35% F.S.
1% F.S.2% F.S.
Operating differential pressure50 ~ 300kPa100 ~ 300kPa150 ~ 300kPa250 ~ 500kPa350 ~ 500kPa
Temperature5 ~ 50℃
Seal materialsAu