High performance digital mass flow meter with ±1%S.P.
MM-3000L Series
A high performance digital mass flow meter equipped with Lintec’s unique ambient temperature compensated flow rate sensor and capable of high-speed measurement.
Since Lintec’s sensor measures the mass flow rate with higher accuracy at lower temperatures than conventional sensors, it has a longer lifetime and can measure the mass flow rate with highly thermally decomposable gases such as O3.
Feature
- Accuracy ±1%S.P.
- Operating temperature 5 to 50°C
- Metal seal
- Clean (zero particle structure)
- Ambient temperature guaranteed sensor
- RS-485 communication
Specification Table
| Model | MM-3102L | MM-3202L | MM-3252L | MM-3452L | MM-3462L | MM-3472L | MM-3582L |
|---|---|---|---|---|---|---|---|
| Flow rate in Nitrogen(Full scale) | 5～5,000SCCM | ～20SLM | ～50SLM | ～50SLM | ～150SLM | ～250SLM | ～400SLM |
| Flow rate control range | 2 ～ 100% F.S. | ||||||
| Accuracy | 100～25% F.S. ±1.0%S.P. 25%～2% F.S. ±0.25% F.S. | 100～35% F.S. ±1.0%S.P. 35%～2% F.S. ±0.35% F.S. | 2% F.S. | 3% F.S. | |||
| Temperature | 5 ～ 50℃ | ||||||
| Seal materials | Au | ||||||