High performance digital mass flow meter with ±1%S.P.

MM-3000L Series

A high performance digital mass flow meter equipped with Lintec’s unique ambient temperature compensated flow rate sensor and capable of high-speed measurement.

Since Lintec’s sensor measures the mass flow rate with higher accuracy at lower temperatures than conventional sensors, it has a longer lifetime and can measure the mass flow rate with highly thermally decomposable gases such as O3.

High Performance Digital Mass Flow Meter
MM-3000L Series


  • Accuracy ±1%S.P.
  • Operating temperature 5 to 50°C
  • Metal seal
  • Clean (zero particle structure)
  • Ambient temperature guaranteed sensor
  • RS-485 communication

Specification Table

Flow rate in Nitrogen(Full scale)5~5,000SCCM~20SLM~50SLM~50SLM~150SLM~250SLM~400SLM
Flow rate control range2 ~ 100% F.S.
Accuracy100~25% F.S. ±1.0%S.P.
25%~2% F.S. ±0.25% F.S.
100~35% F.S. ±1.0%S.P.
35%~2% F.S. ±0.35% F.S.
2% F.S.3% F.S.
Temperature5 ~ 50℃
Seal materialsAu