Ultra high-speed mass flow controller with response time of 200msec.

MC-7000 Series

Achieves high-speed flow control of 200msec (typical) by using a thermal sensor. By using the Lintec’s unique non-contact, thermal flow rate sensor and piezo control valve, it’s possible to control the flow of corrosive gases with ultra-high speed.

This product offers ±1.0% S.P. high accuracy flow rate control, and has DeviceNet or EtherCAT digital communication interface available for selection.

Fast Response Mass Flow Controller MC-7000 Series

Feature

  • Ultra high-speed flow control 200msec
  • Accuracy ±1%S.P.
  • Operating temperature 5 to 50°C
  • Metal seal
  • Clean (zero particle structure)
  • Ambient temperature sensor
  • EtherCAT communication
  • DeviceNet™ communication

Ultra high-speed flow control

Full close to control
Respones time of valve

Example of Use

High-speed etching process

In semiconductor manufacturing process, there is a need to improve the throughput in parallel with miniaturization. Even for mass flow controllers that control the flow rate of reactant gases, there is an increasing demand for shorter flow rate control start (rise) times. The ultra high-speed mass flow controller [MC-7000] is a non-contact thermal flow sensor that does not contact the flow sensor and the flow measuring gas and achieving an ultra-high-speed response of 200 msec. Since it is a non-contact type, high-speed flow rate control is possible for measuring the flow rate of corrosive gases.

Specification Table

TemperatureMinimum differential pressureMaximum differential pressureAccuracyFlow rate control rangeMinimum flow rateMaximum flow rateSeal material
5~50℃50kPa300kPa±1%S.P.2~100%F.S.5SCCM20SLMAu
ModelMC-7100CMC-7200CMC-7100DMC-7200D
Flow rate in Nitrogen(Full scale)10 ~ 5,000SCCM~20SLM10 ~ 5,000SCCM~20SLM
Flow rate control range2 ~ 100% F.S.
Accuracy100% F.S. ~ 25% F.S. ±1.0% S.P.
25% F.S. ~ 2% F.S. ±0.25% F.S.
Response time0.2sec
Operating differential pressure50 ~ 300kPaPlease check our catalog.50 ~ 300kPaPlease check our catalog.
Temperature5 ~ 50℃
Seal materialsSUS316LAu
Digital interfaceEtherCAT®DeviceNetTM