Highly efficient vaporizer with two-fluid nozzle (liquid nozzle and carrier gas nozzle).

A liquid nozzle and a carrier gas nozzle (0.05~4 SLM) merge just before the vaporization chamber to atomize the liquid into fine particles. Highly efficient liquid vaporization is achieved by radiation heat from the atomized liquid.

A liquid control valve on top of the vaporization chamber receives flow signals from a liquid mass flow meter (LM-3000L) and adjusts the valve opening degree. By controlling the flow rate, stable vaporization supply is possible.

High-efficiency vaporizer [VU-430]
High-efficiency vaporizer [VU-430]


  • Highly efficient vaporization
  • Easy maintenance
  • Close proximity valve structure

Example of Use

Vaporization of low vapor pressure materials

Due to heat-resistant structure with a maximum temperature of 200℃ and a double fluid nozzle, highly efficient and stable liquid vaporization supply can be realized for such materials as Low-K, High-k and various metals etc., and even for the low-vapor pressure materials. Precise temperature control is possible by dividing the temperature control of the heater block into the side and bottom. Delicate temperature control is possible even for materials that are subject to denaturation by heat.

Specification Table

Max. temperatureCarrier gas flowMax TEOS vaporization
Max H2O vaporization
Seal materials