BC Series

The BC Series units vaporize and supply various liquid materials by introducing carrier gas and bubbling it in a built-in tank.


  • Carrier gas is controlled with a mass flow controller, and is heated with a heat exchanger to ensure stable supply of liquid material
  • Optimizing the temperature of the entire supply line prevents condensation and ensures a stable supply of vaporized gas.
  • All-in-one design for easy bubbling supply by simply connecting to various utilities
  • Various specifications are available depending on the liquid properties, supply volume, and operating environment.
  • Clean structure for easy maintenance


Bubbling flow chart

Due to superior performance in long-term supply of low-concentration vapor gas, the bubbling unit is often used as a feedstock gas supply source for MOCVD. In addition, simple construction eliminates the need to change parts depending on the liquid type. Therefore, it is often used for tests that don’t require precise accuracy but during which various liquid types are applied.