A flow control valve which is also used for high performance mass flow controllers.

CV-3000 Series

CV-3000 is a stand alone control valve equipped with a piezo actuator that allows high-speed control of gas flow and pressure. The opening angle of the valve is adjusted by external communication (0 to 5V).

SUS-316L block and AU seal enable corrosive gases’ flow control.

Piezoelectric Actuator Control Valve
CV-3000 Series


  • Operating temperature 0 to 50°C
  • Metal seal


  • Low differential pressure
  • Liquefied gas compatible

Example of Use

Pressure control valve

Maintaining a constant chamber pressure is required in many experiments and manufacturing processes. By combining a pressure gauge, PID controller, and CV-3000, the valve can be used as a pressure controller.

Specification Table

Flow rate in Nitrogen(Full scale)100CCM, 500CCM, 5LM10SLM
Flow rate control range2 ~ 100% F.S.
Valve aperture setting0 ~ 5VDC
Response time0.5 sec
Seal materialsAu