VU-900 vaporizer minimizes contact of the liquid precursor with surface of the vaporization chamber by using a double fluid nozzle and blow-up gas, which is flown from the bottom of the vaporization chamber.

The double fluid nozzle achieves highly efficient vaporization, and the blow-up gas from the bottom of the vaporization chamber helps to minimize the contact of the mist with either side of the vaporization chamber. This makes it possible to prevent thermal decomposition. Even substances that are susceptible to thermal decomposition can be stably vaporized and supplied.

There are two types of vaporizers with different vaporization capacity: VU-920 and VU-912. A fitting type can be selected according to vaporization flow rate.

Light Contact Vaporizer [VU-900]
Light Contact Vaporizer [VU-900]


  • High Efficiency Vaporization
  • Light contact vaporization
  • Easy Maintenance
  • Close proximity valve structure


  • Valveless

Example of Use

Vaporization of susceptible to thermal decomposition liquids

Blow-up gas pushes the vaporized mist up after flowing into the vaporization chamber. The contact of the mist with the temperature-change susceptible inner walls of the vaporization chamber is minimized, since the blow up gas collides into the mist before the mist reaches the inner walls. That enables highly efficient vaporization of organometallic liquids, which tend to generate side products due to thermal decomposition, and silane materials, which are subject to polymerization.

Specification Table

ModelMax. temperatureMax H2O vaporizationSeal materials