A method in which a liquid container is heated and the vapor gas flow is controlled by a high-temperature gas mass flow controller.

MFC Baking Method Principle

Baking method
Baking method

Heating the liquid tank vaporizes the liquid and the liquid tank pressure increases due to the vapor pressure of the liquid. The liquefied gas vaporized in the liquid tank flows through the MFC into the chamber.

In this method, the mass flow rate of the vapor gas is measured with the MFC mass flow sensor and is controlled by the MFC control valve. It is important that the operation conditions stay within the MFC operational temperature and differential pressure specifications.

It is possible to supply vapor gas with 100% concentration, but the vaporization temperature is restricted by the MFC operational temperature specifications. The vapor pressure of the liquid and the liquid flow rate are also limited. In order to surpass these limitations, the direct vaporization method was developed.


  • No carrier gas
  • Fast response due to the use of MFC
  • High reliability due to direct gas control

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