High-temperature efficiency vaporizer with a maximum operating temperature of 300°C.

Highly efficient vaporizer with double-fluid nozzle (liquid nozzle and carrier gas nozzle (0.8~180SLM)).

Metal seals and heat-resistant construction enable vaporization at a maximum operating temperature of 300°C.

Equipped with multiple liquid control valves to realize simultaneous flow control and vaporization of multiple liquids such as diluent and cleaning liquid in addition to raw material liquid.

High-temperature, high-efficiency vaporizer VU-550
High-temperature, high-efficiency vaporizer VU-550


  • Highly efficient vaporization
  • Maximum operating temperature 300°C


  • Multiple liquid flow control valve

Example of Use

Vaporization of high boiling point liquid

The double fluid nozzle and heat-resistant structure with a maximum heating temperature of 300℃, make it ideal for vaporizing low-vapor pressure liquids with Low-K, High-k, and various metals etc. high boiling point.

By installing multiple liquid control valves near the vaporization chamber as an option, it is possible to vaporize the raw material liquid, diluted liquid, solvent, etc. separately or simultaneously.

Specification Table

Max. temperatureCarrier gas flowMax TEOS vaporization
Max H2O vaporization
Seal materials