High temperature heat exchanger capable of heating 100 SLM of N2 to 300°C.


  • Maximum flow rate 100 SLM (in N2)
  • Maximum operating temperature 300°C
  • Capable of heating gases that do not corrode the gas contacting material (SUS316L)
  • Can be used under vacuum or pressure

Example of use

Preheating of precursor gas

Since the efficiency of a chemical reaction is affected by temperature, the temperature of the reaction gas often has to be controlled. The HX-0100C with SUS316L wetted parts and 300℃ heating up capability is ideal for preheating precursor gases.

Specification sheet

Flow rate (N2 conversion)Pressure lossWithstand pressure(G)Max. temperaturegas supply section

*Please contact us directly for detailed specifications of high temperature heat exchanger.