High-efficiency vaporizer with double-fluid nozzle and large vaporization chamber for higher vaporization capacity.

Highly efficient vaporizer with double-fluid nozzle (liquid nozzle and carrier gas nozzle (0.8 to 180 SLM)) and larger vaporization chamber volume than VU-430 to improve convection time and heat exchange area. Realizes high flow rate vaporization.

Valve-integrated vaporizer enables liquid flow control in the immediate vicinity of the vaporizer when combined with the LM-3000L. Highly responsive vaporization flow control is possible.

High-efficiency vaporizer [VU-450]
High-efficiency vaporizer [VU-450]


  • Highly efficient vaporization
  • Easy maintenance
  • Close proximity valve structure

Example of Use

High Flow Rate Vaporization

By enlarging the vaporization chamber, the mist sprayed from the center double-fluid nozzle is more diffused than that from VU-430, enabling stable continuous vaporization of high flow rate of 20 g/min for TEOS and 5 g/min for H2O.

Specification Table

Max. temperatureCarrier gas flowMax TEOS vaporization
Max H2O vaporization
Seal materials