Mass Flow Controller Power Supply|Vaporizer Temperature Controller

Connection examples of Lintec products and various accessories required to use Lintec products (mass flow controllers, vaporizers, heat exchangers).

Power Supply/Read-Out Unit for MFC [RP-310]

By connecting one Lintec mass flow controller and one Power Supply/Read-Out Unit for MFC (RP-310) with a dedicated cable, it is possible to set and read out the flow rate (both current and totalized) via analog communication.

Examples of Use

• Sensible MFC flow rate setting with potentiometer
• Stand-alone MFC flow control
• Display of the totalized flow rate of the MFC
• Flow control of MFC in both local and remote modes (host PLC)

Power supply unit for MFC [PS Series]

By using the power supply unit (PS Series), which can connect up to 9 mass flow controllers, multiple MFCs can be controlled by a PC, PLC, or other means.

Examples of Use

• Power supply for MFC digital control from a PC (e.g. LabVIEW)
• Power supply for MFC control from a PLC

MFC in-line monitor [IM-10]

By connecting an in-line monitor (IM-10) between the mass flow controller and the equipment power supply, input signals, output signals, valve open/close signals, and power supply voltage voltages are measured. The operation of the mass flow controller can be checked inline.

Examples of Use

• Check supply voltage (±15V) to MFC
• Check the MFC flow rate setting value (0 to 5V)
• Check the MFC flow output value (0 to 5V)
• Check the MFC valve open/close signal

Temperature Control Unit [TCU Series]

Temperature control unit provides power supply and allows temperature adjustment for Lintec heat exchangers (HX series), liquid vaporizers (VU series), or other products that require temperature control.

Examples of Use

• Temperature Control of Heat Exchangers (HX Series)
• Temperature control of vaporizers (VU Series)