Mass flow controller for high temperature applications that can be used in environments with the maximum operation temperature 120℃ (150℃ when not energized).

MC-3000L-TC Series

Gas control at high temperature is possible by separating the wetted part and the circuit board part  which is sensitive to heat.

SUS-316L is used for the block and Au is used for the sealing material, making it compatible with corrosive gases.

Low differential pressure specification that prevents condensation of liquified gas and MFC special heater block to heat up the wetted part are also available as options.

High Temperature Mass Flow Controller
MC-3000L-TC Series
High Temperature Mass Flow Controller MC-3000L-TC Series

 Feature

  • Operating temperature Max 120°C
  • Metal seal
  • Clean (zero particle structure)
  • RS-485 communication

Option

  • Liquefied Gas Compatible
  • Heater block

Example of Use

Liquefied gas, sublimation gas flow control

The precursor gases for CVD and ALD are not always at the normal temperature and pressure. Liquids and solid materials generate less gas at normal temperatures, making it difficult to control the flow rate with MFCs that use differential pressure to flow gas. Therefore, the operating pressure of the MFC is secured by heating the raw material tank and increasing the vapor pressure to generate differential pressure. MC-3000L-TC, which is capable of flow control at high temperatures and low differential pressure, is ideal for controlling the flow rate of liquefied gas and sublimated gas.

Specification Table

ModelMC-3102L-TCMC-3202L-TC
Flow rate in Nitrogen(Full scale)10 ~ 5,000SCCM~ 25SLM
Flow rate control range2 ~ 100% F.S.
Accuracy±1.0% F.S.
Operating differential pressure50 ~ 300kPa150 ~ 300kPa
TemperatureL:80 ~ 100℃
H:100 ~ 120℃
Seal materialsAu