FL Series
FL series utilizes mass flow controllers to stably supply multiple gases at specified concentrations and flow rates. It contributes to reduction of running costs by eliminating the need to purchase mixed gases.
Features
- Supplies mixed gas at set time and amount.
- Automatically supplies mixed gas of a constant density even if the supply volume changes.
- Various specifications are available depending to gas type, supply volume, and operating environment.
- Clean structure for easy maintenance.
- Various alarm setting functions for safety.
- Stable supply is possible by the design considering the physical properties of the gas.
Application
Multi gas mixers, which control the pure gas flow and automatically generate mixed gases in a buffer tank, can efficiently replace high running cost mixed gas cylinders. By monitoring the usage volume with a mass flow meter, the system switches the mixed gas production volume mode. This allows for less frequent maintenance than mixed gas cylinders and reduces running costs at production plants.
- Download the specification of FL Series