Micro flow rate compact liquid vaporizer with piezo valve.

Piezo actuator for high-speed, high-precision micro-flow control is mounted near the vaporization chamber. Low dead volume structure.

Compact vaporizer with maximum vaporization flow rates in TEOS: 5g/min & in H2O: 0.5g/min. Stable supply is possible by mixing carrier gas (max. flow rate 14 SLM) and flow-controlled liquid and introducing them into the vaporization chamber.

Compact vaporizer VU-206
Compact vaporizer VU-206


  • Low vaporization flow rate
  • Easy maintenance
  • Close proximity valve structure

Examples of Use

Low flow rate vaporization under vacuum and atmospheric conditions

Compact vaporizer size enables precise vapor supply at continuous micro flow rates. Stable low flow rate vaporization is possible regardless of downstream pressure conditions.

TEOS, TEB, TEPO vaporization supply

Capable of supplying not only TEOS, which is widely used in semiconductor manufacturing processes, but also various other liquids such as TEB and TEPO. In addition, multiple liquids can be vaporized and supplied simultaneously by using vaporizers in series.

Specification Table

Max. temperatureCarrier gas flowMax TEOS vaporization
Max H2O vaporization
Seal materials