High performance digital liquid mass flow controller with built-in piezo actuator in mass flow sensor for liquid.

LC-3000L Series

Mass flow controller for liquid that integrates a thermal type flow sensor for liquid and a high precision piezo actuator valve.

The current mass flow rate is measured by the liquid mass flow sensor, and the opening degree of the piezoelectric valve is controlled by feedback control, enabling automatic control of liquid mass flow rate at high speed.

High Performance Digital Mass Flow Controller
LC-3000L Series
High Performance Digital Mass Flow Controller LC-3000L Series


  • Micro flow liquid control
  • Accuracy ±1% F.S.
  • Clean (Particle Guaranteed)
  • RS-485 communication

Examples of Use

Continuous control of minute flow rates without pulsation

Although metering pumps are convenient products that can flow a fixed amount of liquid, they are subject to pulsation due to their moving parts. Lintec’s liquid mass flow controllers provide stable, pulsation-free flow control as long as the pump is pressurized at an appropriate and constant pressure.

Liquid Control to Vacuum Equipment

Under vacuum conditions on the secondary side, the liquid will be displaced by the positive displacement type, making flow control difficult. The liquid mass flow controller (LC-3000 series), which integrates a control valve and mass flow sensor, can control flow regardless of secondary pressure under appropriate differential pressure conditions.

Specification Table

Flow rate C2H5OH conversion0.1 ~ 1.0g/min1.0 ~ 2.0g/min~ 30g/min
Flow rate H2O conversion0.1 ~ 0.2g/min0.2 ~ 0.4g/min~ 15g/min
Flow rate control range5~100% F.S.10~100% F.S.
Valve operation modeNormally openNormally closed
Flow rate control range5~100% F.S.10~100% F.S.
Operating differential pressure50 ~ 300kPa
Temperature15 ~ 35℃20 ~ 30℃15 ~ 35℃
Seal materialsAu