A high performance digital liquid mass flow controller combining a built-in piezo actuator with the liquid mass flow sensor.

LC-3000L Series

A liquid mass flow controller which integrates a thermal liquid flow rate sensor and a high precision piezo actuator valve.

By measuring the current mass flow rate with a liquid mass flow sensor and controlling the opening degree of the piezo valve with the feedback, it is possible to automatically control the liquid mass flow rate at high speed.

High Performance Digital Mass Flow Controller
LC-3000L Series


  • Micro flow liquid control
  • Accuracy ±1% F.S.
  • Clean (zero particle structure)
  • RS-485 communication

Example of Use

Continuous control of micro flow rate without pulsation

Although metering pumps are convenient products that can flow a fixed amount of liquid, due to the moving parts they are subject to pulsation. Lintec’s liquid mass flow controllers are capable of stable flow control without pulsation as long as they are pressurized at an appropriate and constant pressure.

Liquid Control to Vacuum Equipment

If a metering pump is applied for flow control under downstream vacuum conditions, liquid tends to escape, making it hard to control the flow control. The liquid mass flow controller (LC-3000 series), which integrates a control valve and mass flow sensor, can control the flow rate regardless of the secondary pressure as long as the specified differential pressure conditions are met.

Specification Table

Flow rate C2H5OH conversion0.1 ~ 1.0g/min1.0 ~ 2.0g/min~ 30g/min
Flow rate H2O conversion0.1 ~ 0.2g/min0.2 ~ 0.4g/min~ 15g/min
Flow rate control range5~100% F.S.10~100% F.S.
Valve operation modeNormally openNormally closed
Flow rate control range5~100% F.S.10~100% F.S.
Operating differential pressure50 ~ 300kPa
Temperature15 ~ 35℃20 ~ 30℃15 ~ 35℃
Seal materialsAu