High-temperature filter integrating a 0.1μm filter and heater.

Designed for use with liquefied gas in the semiconductor manufacturing process, all gas contacting parts are SUS316L, Lintec’s unique low pressure loss construction.


  • 0.1µm filtration accuracy
  • Max200℃
  • All-metal clean construction

examples showing the use (of a word)

Heated filters are installed behind vaporization systems and bubbling to remove verticles and mist that can lead to product defects.