This is a dedicated operation check device for mass flow controllers that can check the voltage status of the set voltage and output voltage with the MFC.

It also has a built-in low-power voltmeter to monitor whether the signals from the device and the signals from the MFC to the device are normal, making it easy to find the cause of malfunctioning.

MFC in-line monitor

Connection example

Connect this device between the mass flow controller and the tool power supply, or between the mass flow controller and the power supply/read-out unit for MFC (RP-310) to measure and check various signals and voltages.

Measuring Functions

  • Power supply voltage (±15VDC)
  • Flow setting voltage (0-5VDC)
  • Flow output voltage (0-5VDC)
  • Valve open/close voltage (±15VDC)
  • Shell voltage