This is a dedicated operation check device for mass flow controllers that can check the voltage status of the set voltage and output voltage with the MFC.
It also has a built-in low-power voltmeter to monitor whether the signals from the device and the signals from the MFC to the device are normal, making it easy to find the cause of malfunctioning.
![](https://ld7wbevg6gkl.cdn.shift8web.com/en/wp-content/uploads/2023/07/IM-10.jpg)
Connection example
![](https://ld7wbevg6gkl.cdn.shift8web.com/en/wp-content/uploads/2023/07/IM-10.png)
Connect this device between the mass flow controller and the tool power supply, or between the mass flow controller and the power supply/read-out unit for MFC (RP-310) to measure and check various signals and voltages.
Measuring Functions
- Power supply voltage (±15VDC)
- Flow setting voltage (0-5VDC)
- Flow output voltage (0-5VDC)
- Valve open/close voltage (±15VDC)
- Shell voltage