SVC Series
The SVC series is a system that supplies liquid gas by heating a built-in tank and controlling the flow of vaporized gas with a high temperature mass flow controller. As a manufacturer of fluid measurement and control equipment, we realize stable fluid supply by designing equipment that is tailored to the physical properties of the liquid.
Features
- Optimizes the temperature of the entire supply line to prevent liquefaction and provide a stable supply of vaporized gas.
- All-in-one design for easy baking supply by simply connecting to various utilities.
- Various specifications are available depending on the liquid properties, supply volume, and operating environment.
- Clean structure for easy maintenance.
- Equipped with various alarm setting functions for safety.
Application
The SVC series units are used to vaporize and supply liquid materials required in production facilities, such as C7H8 used in the deposition of carbon-based thin films such as DLC, SiCl4, an essential material for optical fiber production, and H2O used in the ashing performed during resist stripping, one of the semiconductor manufacturing processes. Baking units are generally used under vacuum (reduced pressure) conditions downstream the MFC.
Examples of Liquid Material Achievements
CH3OH / C5H5N / C5H8O2 / H2O / HMDS / HMDSO / OMCTS / SiCl4 / TEOS / TMCTS
*It is also possible to apply liquid types other than the above depending on the conditions (downstream pressure loss, vapor pressure, etc.). Please contact us for more details.
- Download the specification of SVC Series