Mass Flow Controller with One-Year Guarantee for Ozone Gas
Lintec’s unique ambient temperature-compensated sensor ensures highly accurate flow measurement, even at low temperatures. This controller ensures stable flow control of thermally decomposable ozone gas without changing its concentration over long-term use. (Based on our research)
Feature
- Enables ozone gas flow control
- Accuracy: ±1% S.P. (calibrated gas)
- Clean (particle-guaranteed)
- Ambient temperature compensation sensor
- Supports EtherCAT and DeviceNet communication
Option
- Low differential pressure compatible
- Wide range
Example of Use
Supplies ozone from a generator to multiple CVD and cleaning systems.
Ozone’s high corrosiveness has traditionally made flow control with MFCs difficult, requiring one ozone generator per demand point. However, with the OZ-1 Ozone Gas Mass Flow Controller, which minimizes thermal decomposition during flow measurement, a single ozone generator can now supply multiple demand points.
Specification Table
| Temperature | Min operating diff pressure | Max operating diff pressure | Accuracy | Control Range | Min F.S. | Max F.S. |
| 5～50℃ | 50kPa | 300kPa | ±1%S.P. | 2~100%F.S. | 10SCCM | 50SLM |