The high temperature mass flow meter that can be used in environments with the maximum operation temperature of 120℃ (150℃ when not energized).

MM-3000L-TN Series

High temperature is possible by separating the wetted part and the circuit board part which is sensitive to heat.

High Temperature Mass Flow Meter MM-3000L-TN Series
MM-3000L-TN

Feature

  • Operating temperature Max 120°C
  • Metal seal
  • Clean (zero particle structure)
  • RS-485 communication

Option

  • Heater block

Specification Table

ModelMC-3102L-TCMC-3202L-TC
Flow rate in Nitrogen(Full scale)10 ～ 5,000SCCM～ 25SLM
Flow rate control range2 ～ 100% F.S.
Accuracy±1.0% F.S.
TemperatureL：80 ～ 100℃
H：100 ～ 120℃
Seal materialsAu
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