Mass flow controller for high temperature applications that can be used in environments with the maximum operation temperature 120℃ (150℃ when not energized).
MC-3000L-TC Series
Gas control at high temperature is possible by separating the wetted part and the circuit board part which is sensitive to heat.
SUS-316L is used for the block and Au is used for the sealing material, making it compatible with corrosive gases.
Low differential pressure specification that prevents condensation of liquified gas and MFC special heater block to heat up the wetted part are also available as options.
Feature
- Operating temperature Max 120°C
- Metal seal
- Clean (zero particle structure)
- RS-485 communication
Option
- Liquefied Gas Compatible
- Heater block
Example of Use
Liquefied gas, sublimation gas flow control
The precursor gases for CVD and ALD are not always at the normal temperature and pressure. Liquids and solid materials generate less gas at normal temperatures, making it difficult to control the flow rate with MFCs that use differential pressure to flow gas. Therefore, the operating pressure of the MFC is secured by heating the raw material tank and increasing the vapor pressure to generate differential pressure. MC-3000L-TC, which is capable of flow control at high temperatures and low differential pressure, is ideal for controlling the flow rate of liquefied gas and sublimated gas.
Specification Table
| Model | MC-3102L-TC | MC-3202L-TC |
|---|---|---|
| Flow rate in Nitrogen(Full scale) | 10 ～ 5,000SCCM | ～ 25SLM |
| Flow rate control range | 2 ～ 100% F.S. | |
| Accuracy | ±1.0% F.S. | |
| Operating differential pressure | 50 ～ 300kPa | 150 ～ 300kPa |
| Temperature | L：80 ～ 100℃ H：100 ～ 120℃ | |
| Seal materials | Au | |