High performance mass flow controller for EtherCAT communication.
MC-5000C Series
High performance EtherCAT mass flow controller for semiconductor processes. It is compliant with SEMI standards and can be controlled by using the EtherCAT communication, which is used to speed up the transport system of semiconductor manufacturing equipment.
This MFC has a full metal seal, which is a requirement in most semiconductor manufacturing processes, and Lintec’s unique ambient temperature compensated flow rate sensor; liquefied gas operations are also possible with the “liquified gas” option.
Feature
- Accuracy ±1% S.P.
- Metal seal
- Clean (zero particle structure)
- Ambient temperature sensor
- EtherCAT communication
Option
- Micro Flow F.S.
- Compatible with liquefied gas
- Wide range
Example of Use
Communication Unification of EtherCAT Communication Devices
EtherCAT communication (digital interface) is increasingly used in semiconductor manufacturing equipment for high-speed control of robot arms and other transport systems. 65,536 nodes are available for EtherCAT communication, enabling unification of all measurement and motion elements of the MFC with EtherCAT communication.
Specification Table
| Model | MC-5100C | MC-5200C | MC-5250C | MC-5460C | MC-5470C | MC-5580C |
|---|---|---|---|---|---|---|
| Flow rate in Nitrogen(Full scale) | 5～5,000SCCM | ～20SLM | ～50SLM | ～150SLM | ～200SLM | ～300SLM |
| Flow rate control range | 2 ～ 100% F.S. | |||||
| Accuracy | 100～25% F.S. ±1.0%S.P. 25%～2% F.S. ±0.25% F.S. | 100～35% F.S. ±1.0%S.P. 35%～2% F.S. ±0.35% F.S. | 1% F.S. | 2% F.S. | ||
| Operating differential pressure | 50 ～ 300kPa | 100 ～ 300kPa | 150 ～ 300kPa | 250 ～ 500kPa | 350 ～ 500kPa | |
| Temperature | 5 ～ 50℃ | |||||
| Seal materials | Au | |||||