Mass flow controller for DeviceNet communication.
MC-5000L Series
In order to achieve high speed control and simplify the wiring system, more and more control devices installed in the newest semiconductor manufacturing tools have started to utilize not analog, but open fieldwork communication.
Lintec has pioneered the industry by developing MC-5000L mass flow controller with DeviceNet™ communication that fully complies with SEMI standards. This MFC is full metal sealed, which is a requirement in most semiconductor manufacturing processes, and Lintec’s unique ambient temperature compensated flow rate sensor; liquefied gas operations are also possible with the “liquified gas” option.
Feature
- Accuracy ±1%S.P.
- Operating temperature 5 to 50°C
- Metal seal
- Clean (zero particle structure)
- Ambient temperature sensor
- DeviceNet™ communication
Option
- Micro Flow F.S.
- Compatible with liquefied gas
- Wide range
Example of Use
Simplified Wiring
Field network control is increasing in semiconductor equipment. The MFC for DeviceNet communication (MC-5000L) does not require the AD/DA converter or IO board which allows to reduce costs and simplify wiring.
Specification Table
| Model | MC-5100L | MC-5200L | MC-5250L | MC-5460L | MC-5470L |
|---|---|---|---|---|---|
| Flow rate in Nitrogen(Full scale) | 5～5,000SCCM | ～20SLM | ～50SLM | ～150SLM | ～200SLM |
| Flow rate control range | 2 ～ 100% F.S. | ||||
| Accuracy | 100～25% F.S. ±1.0%S.P. 25%～2% F.S. ±0.25% F.S. | 100～35% F.S. ±1.0%S.P. 35%～2% F.S. ±0.35% F.S. | 1% F.S. | ||
| Operating differential pressure | 50 ～ 300kPa | Please check our catalog. | Please check our catalog. | 250 ～ 500kPa | 350 ～ 500kPa |
| Temperature | 5 ～ 50℃ | ||||
| Seal materials | Au | ||||