Lintec’s gas flow control and measurement products
Mass Flow Controller
| Feature | Model | Communication standard Power source | Temperature Response speed Accuracy | Keywords Usage |
|---|---|---|---|---|
 High-speed MFC | MC-7000 | DeviceNet EtherCAT DC24V power supply | 5~50℃ 0.2sec ±1.0%S.P. | Semiconductor Film deposition ALD |
 EtherCAT MFC | MC-5000C | EtherCAT DC24V power supply | 5~50℃ 1sec ±1.0%S.P. | Semiconductor Film deposition ALD |
 DeviceNet MFC | MC-5000L | DeviceNet DC24V power supply | 5~50℃ 1sec ±1.0%S.P. | Semiconductor Film deposition ALD |
 Digital MFC | MC-3000L | RS-485 Analog 0~5V ±15V power supply | 5~50℃ 1sec ±1.0%S.P. | Semiconductor Film deposition Analyzers |
 High-temperature MFC | MC-3000L-TC | RS-485 Analog 0~5V ±15V power supply | Max120℃ 1sec ±1.0%F.S. | Semiconductor Film deposition Liquefied gas Analyzers |
 Low differential pressure MFC | MC-3000S | RS-485 Analog 0~5V ±15V power supply | 5~50℃ 1sec ±1.0%F.S. | Semiconductor Film deposition Liquefied gas Solid sublimation |
 Variable MFC | MC-700 | RS-485 Analog 0~5V ±15V power supply | 15~35℃ 1sec ±1.0%F.S. | Semiconductor Film deposition Analyzers |
 Low-cost MFC | MC-10 | RS-485(option) Analog 0~5V ±15V power supply | 15~35℃ 1sac ±1.0%F.S. | Inert gas Analyzers |
Mass Flow Meter
| Feature | Model | Communication standard Power source | Temperature Accuracy | Keywords Usage |
|---|---|---|---|---|
 Digital MFM | MM-3000L | RS-485 Analog 0~5V ±15V power supply | 5~50℃ ±1.0%S.P. | Semiconductor Film deposition Analyzers |
 High-temperature MFM | MM-3000L-TN | RS-485 Analog 0~5V ±15V power supply | Max120℃ ±1.0%F.S. | Semiconductor Film deposition Liquefied gas Analyzers |
Control Valve
| Feature | Model | Power source | Temperature Response speed | Keywords Usage |
|---|---|---|---|---|
 Control valve | CV-3000L | 0～5V | 0~50℃ 0.5sec | Primary pressure control Back pressure control Bubbling |