High-efficiency vaporizer with double-fluid nozzle and large vaporization chamber for higher vaporization capacity.
Highly efficient vaporizer with double-fluid nozzle (liquid nozzle and carrier gas nozzle (0.8 to 180 SLM)) and larger vaporization chamber volume than VU-430 to improve convection time and heat exchange area. Realizes high flow rate vaporization.
Valve-integrated vaporizer enables liquid flow control in the immediate vicinity of the vaporizer when combined with the LM-3000L. Highly responsive vaporization flow control is possible.
![High-efficiency vaporizer [VU-450]](https://ld7wbevg6gkl.cdn.shift8web.com/en/wp-content/uploads/2023/07/VU-0450N.jpg)
Feature
- Highly efficient vaporization
- Easy maintenance
- Close proximity valve structure
Example of Use
High Flow Rate Vaporization
By enlarging the vaporization chamber, the mist sprayed from the center double-fluid nozzle is more diffused than that from VU-430, enabling stable continuous vaporization of high flow rate of 20 g/min for TEOS and 5 g/min for H2O.
Specification Table
| Max. temperature | Carrier gas flow | Max TEOS vaporization Max H2O vaporization | Seal materials |
|---|---|---|---|
| 200℃ | 0.8~130SLM | 20g/min 5g/min | Au |