High temperature filter with integrated 0.1 μm filter and a heater.
Designed for use with liquefied gas in the semiconductor manufacturing process, all wetted parts are made of SUS316L. The pressure loss is minimal due to Lintec’s original low pressure loss design.
Feature
- 0.1µm filtration accuracy
- Max200℃
- All-metal clean construction
Example of use
The heating filter is usually installed downstream the vaporization system to remove particles and mist, which may lead to wafer defect.