About LINTEC
A pioneer in fluid control technology
LINTEC is a Japanese company aiming to revolutionize the semiconductor industry by developing gas and liquid flow control, vaporization, and heat exchange technology.
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LINTEC was founded in 1987 as a semiconductor industry-oriented gas mass flow controller manufacturing firm.
LINTEC pioneered the liquid vapor delivery tech by being the first company in the world
to develop a liquid mass flow controller for TEOS flow rate control and a vaporization system for precisely controlled TEOS flow rate.
LINTEC also offers high-efficiency compact heat exchangers、
as well as cabinets that integrate our products based on the needs of the customer.
“One-of-a-kind” fluid control technology
LINTEC was the first company to develop a liquid mass flow controller,
and still continues to develop original, “one-of-a-kind” technology.
MFC/MFM
- MFC for O3 flow control
- 0.2sec fast response MFC
- MFC for liquids
Vaporizer
- High efficiency vaporizer
- Quartz vaporizer
- High flow rate vaporizer
- Non-carrier gas vaporizer
Heat exchanger
- Compact heat exchanger
- High flow rate heat exchanger
- High temperature heat exchanger
LINTEC Quality Policy
We deliver exceptional service and high-quality products
to ensure that our customers’ expectations are fully met.
ISO 9001
