{"id":94,"date":"2016-12-01T16:02:26","date_gmt":"2016-12-01T07:02:26","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=94"},"modified":"2024-03-25T10:57:55","modified_gmt":"2024-03-25T01:57:55","slug":"devicenet-mass-flow-controller","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/","title":{"rendered":"DeviceNet Mass Flow Controller"},"content":{"rendered":"\n<p>Mass flow controller for DeviceNet communication.<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\">MC-5000L Series<\/h2>\n\n\n\n<p>In order to achieve high speed control and simplify the wiring system, more and more control devices installed in the newest semiconductor manufacturing tools have started to utilize not analog, but open fieldwork communication.<\/p>\n\n\n\n<p>Lintec has pioneered the industry by developing MC-5000L mass flow controller with DeviceNet\u2122 communication that fully complies with SEMI standards. This MFC is full metal sealed, which is a requirement in most semiconductor manufacturing processes, and Lintec\u2019s unique <a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#ambient-temperature-compensated-flow-rate-sensor\" title=\"\"><span class=\"epb-underline\">ambient temperature compensated flow rate sensor<\/span><\/a>; liquefied gas operations are also possible with the \u201cliquified gas\u201d option.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"200\" height=\"73\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/Device-Net.jpg\" alt=\"\" class=\"wp-image-1822\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"638\" height=\"420\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L.jpg\" alt=\"DeviceNetTM Mass Flow Controller\nMC-5000L Series\" class=\"wp-image-1763\" srcset=\"https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-5000L.jpg 638w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-300x197.jpg 300w\" sizes=\"(max-width: 638px) 100vw, 638px\" \/><figcaption class=\"wp-element-caption\">MC-5000L<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-6\">\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Accuracy \u00b11%S.P.<\/li>\n\n\n\n<li>Operating temperature 5 to 50\u00b0C<\/li>\n\n\n\n<li>Metal seal<\/li>\n\n\n\n<li>Clean (zero particle structure)<\/li>\n\n\n\n<li>Ambient temperature sensor<\/li>\n\n\n\n<li>DeviceNet\u2122 communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#0693e3\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(6, 147, 227, 0.7) 0);\">Option<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Micro Flow F.S.<\/li>\n\n\n\n<li>Compatible with liquefied gas<\/li>\n\n\n\n<li>Wide range<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Example of Use<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">Simplified Wiring<\/h4>\n\n\n\n<p class=\"epb-margin-top__8\">Field network control is increasing in semiconductor equipment. The MFC for DeviceNet communication (MC-5000L) does not require the AD\/DA converter or IO board which allows to reduce costs and simplify wiring.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Specification Table<\/h3>\n\n\n\n<figure class=\"wp-block-table is-style-table__side epb-margin-top__8 has-small-font-size\"><table class=\"has-fixed-layout\"><thead><tr><th>Model<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5100L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5200L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5250L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5460L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5470L<\/th><\/tr><\/thead><tbody><tr><td>Flow rate in Nitrogen(Full scale)<\/td><td class=\"has-text-align-center\" data-align=\"center\">5\uff5e5,000SCCM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e20SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e50SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e150SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e200SLM<\/td><\/tr><tr><td>Flow rate control range<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"5\">2 \uff5e 100% F.S.<\/td><\/tr><tr><td>Accuracy<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"3\">100\uff5e25% F.S. \u00b11.0%S.P.<br>25%\uff5e2% F.S. \u00b10.25% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">100\uff5e35% F.S. \u00b11.0%S.P.<br>35%\uff5e2% F.S. \u00b10.35% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">1% F.S.<\/td><\/tr><tr><td>Operating differential pressure<\/td><td class=\"has-text-align-center\" data-align=\"center\">50 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><td class=\"has-text-align-center\" data-align=\"center\">250 \uff5e 500kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">350 \uff5e 500kPa<\/td><\/tr><tr><td>Temperature<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"5\">5 \uff5e 50\u2103<\/td><\/tr><tr><td>Seal materials<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"5\">Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"MC-5000L Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-4af770d4-ce8d-4d54-becb-2b7015db9742\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-Series.pdf\">MC-5000L Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-4af770d4-ce8d-4d54-becb-2b7015db9742\">\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Mass flow controller for DeviceNet communication. MC-5000L Series In order to achieve high speed control and s [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":15,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/94"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=94"}],"version-history":[{"count":13,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/94\/revisions"}],"predecessor-version":[{"id":2531,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/94\/revisions\/2531"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=94"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}