{"id":94,"date":"2016-12-01T16:02:26","date_gmt":"2016-12-01T07:02:26","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=94"},"modified":"2024-03-25T10:57:55","modified_gmt":"2024-03-25T01:57:55","slug":"devicenet-mass-flow-controller","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/","title":{"rendered":"DeviceNet Mass Flow Controller"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\">Mass flow controller for DeviceNet communication.<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-679ddeda wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h2 class=\"wp-block-heading\">MC-5000L Series<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">In order to achieve high speed control and simplify the wiring system, more and more control devices installed in the newest semiconductor manufacturing tools have started to utilize not analog, but open fieldwork communication.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Lintec has pioneered the industry by developing MC-5000L mass flow controller with DeviceNet\u2122 communication that fully complies with SEMI standards. This MFC is full metal sealed, which is a requirement in most semiconductor manufacturing processes, and Lintec&#8217;s unique <a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#ambient-temperature-compensated-flow-rate-sensor\" title=\"\"><span class=\"epb-underline\">ambient temperature compensated flow rate sensor<\/span><\/a>; liquefied gas operations are also possible with the \u201cliquified gas\u201d option.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"200\" height=\"73\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/Device-Net.jpg\" alt=\"\" class=\"wp-image-1822\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"638\" height=\"420\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L.jpg\" alt=\"DeviceNetTM Mass Flow Controller\nMC-5000L Series\" class=\"wp-image-1763\" srcset=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L.jpg 638w, https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-300x197.jpg 300w\" sizes=\"auto, (max-width: 638px) 100vw, 638px\" \/><figcaption class=\"wp-element-caption\">MC-5000L<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-679ddeda wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8 wp-block-list\">\n<li>Accuracy \u00b11%S.P.<\/li>\n\n\n\n<li>Operating temperature 5 to 50\u00b0C<\/li>\n\n\n\n<li>Metal seal<\/li>\n\n\n\n<li>Clean (zero particle structure)<\/li>\n\n\n\n<li>Ambient temperature sensor<\/li>\n\n\n\n<li>DeviceNet\u2122 communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#0693e3\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(6, 147, 227, 0.7) 0);\">Option<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8 wp-block-list\">\n<li>Micro Flow F.S.<\/li>\n\n\n\n<li>Compatible with liquefied gas<\/li>\n\n\n\n<li>Wide range<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Example of Use<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">Simplified Wiring<\/h4>\n\n\n\n<p class=\"epb-margin-top__8 wp-block-paragraph\">Field network control is increasing in semiconductor equipment. The MFC for DeviceNet communication (MC-5000L) does not require the AD\/DA converter or IO board which allows to reduce costs and simplify wiring.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Specification Table<\/h3>\n\n\n\n<figure class=\"wp-block-table is-style-table__side epb-margin-top__8 has-small-font-size\"><table class=\"has-fixed-layout\"><thead><tr><th>Model<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5100L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5200L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5250L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5460L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5470L<\/th><\/tr><\/thead><tbody><tr><td>Flow rate in Nitrogen(Full scale)<\/td><td class=\"has-text-align-center\" data-align=\"center\">5\uff5e5,000SCCM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e20SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e50SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e150SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e200SLM<\/td><\/tr><tr><td>Flow rate control range<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"5\">2 \uff5e 100% F.S.<\/td><\/tr><tr><td>Accuracy<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"3\">100\uff5e25% F.S. \u00b11.0%S.P.<br>25%\uff5e2% F.S. \u00b10.25% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">100\uff5e35% F.S. \u00b11.0%S.P.<br>35%\uff5e2% F.S. \u00b10.35% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">1% F.S.<\/td><\/tr><tr><td>Operating differential pressure<\/td><td class=\"has-text-align-center\" data-align=\"center\">50 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><td class=\"has-text-align-center\" data-align=\"center\">250 \uff5e 500kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">350 \uff5e 500kPa<\/td><\/tr><tr><td>Temperature<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"5\">5 \uff5e 50\u2103<\/td><\/tr><tr><td>Seal materials<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"5\">Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div data-wp-interactive=\"core\/file\" class=\"wp-block-file\"><object data-wp-bind--hidden=\"!state.hasPdfPreview\" hidden class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"MC-5000L Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-4af770d4-ce8d-4d54-becb-2b7015db9742\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-Series.pdf\">MC-5000L Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000L-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-4af770d4-ce8d-4d54-becb-2b7015db9742\">\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Mass flow controller for DeviceNet communication. MC-5000L Series In order to achieve high speed control and s [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":15,"comment_status":"closed","ping_status":"closed","template":"","meta":{"emanon_ad_label_edit":"initial","emanon_hide_header":"","emanon_hide_header_menu":"","emanon_hide_header_menu_sp":"","emanon_hide_featured_image":"0","emanon_disabled_overlay":"0","emanon_hide_title":"0","emanon_hide_sidebar":"0","emanon_hide_breadcrumb":"0","emanon_hide_toc":"0","emanon_hide_sns":"0","emanon_hide_follow":"0","emanon_hide_ad":"0","emanon_disabled_background_color":"0","emanon_hide_content_margin_top":"","emanon_hide_content_margin_bottom":"0","emanon_hide_left_right_margin_sp":"0","emanon_hide_footer_section":"0","emanon_hide_footer":"","emanon_hide_fixed_sidebar_menu":"","emanon_hide_floating_hamburger_menu":"0","emanon_hide_hamburger_menu_pc":"","emanon_hide_hamburger_menu_sp_tb":"","emanon_hide_fixed_footer_menu":"0","emanon_one_column_width":"","emanon_subtitle":"","emanon_cta_cv_type":"cta-cv-not","emanon_cta_floating_cv_type":"cta-cv-not","emanon_cta_newsletter_cv_type":"cta-cv-not","emanon_cta_id":"","emanon_cta_floating_id":"","emanon_cta_newsletter_id":"","emanon_noindex":"0","emanon_nofollow":"0","emanon_meta_description":"","get_emanon_structured_data_profile_page_name":[],"emanon_custom_footer_shortcode":"","emanon_custom_header_shortcode":"","footnotes":""},"class_list":["post-94","page","type-page","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t<!-- All in One SEO 4.9.9 - aioseo.com -->\n\t<meta name=\"description\" content=\"Mass flow controller for DeviceNet communication. 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MC-50\",\"inLanguage\":\"ja\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/#website\"},\"breadcrumb\":{\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/mass-flow-controller\\\/gas\\\/devicenet-mass-flow-controller\\\/#breadcrumblist\"},\"datePublished\":\"2016-12-01T16:02:26+09:00\",\"dateModified\":\"2024-03-25T10:57:55+09:00\"},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/#website\",\"url\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/\",\"name\":\"LINTEC\",\"description\":\"Mass Flow Controller\\uff5cVaporizer\\uff5cThe pioneer in flow control\",\"inLanguage\":\"ja\",\"publisher\":{\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/#organization\"}}]}\n\t\t<\/script>\n\t\t<!-- All in One SEO -->\n\n","aioseo_head_json":{"title":"DeviceNet Mass Flow Controller - LINTEC","description":"Mass flow controller for DeviceNet communication. MC-50","canonical_url":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/","robots":"max-image-preview:large","keywords":"","webmasterTools":{"google-site-verification":"google-site-verification: google6b6d5b4c5998acdc.html","miscellaneous":""},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"BreadcrumbList","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/#breadcrumblist","itemListElement":[{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en#listItem","position":1,"name":"Home","item":"https:\/\/lintec-mfc.co.jp\/en","nextItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#listItem","name":"Mass Flow Controller Operating Princinple"}},{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#listItem","position":2,"name":"Mass Flow Controller Operating Princinple","item":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/","nextItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/#listItem","name":"Gas Mass Flow Controller\/Meter"},"previousItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en#listItem","name":"Home"}},{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/#listItem","position":3,"name":"Gas Mass Flow Controller\/Meter","item":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/","nextItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/#listItem","name":"DeviceNet Mass Flow Controller"},"previousItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#listItem","name":"Mass Flow Controller Operating Princinple"}},{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/#listItem","position":4,"name":"DeviceNet Mass Flow Controller","previousItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/#listItem","name":"Gas Mass Flow Controller\/Meter"}}]},{"@type":"Organization","@id":"https:\/\/lintec-mfc.co.jp\/en\/#organization","name":"LINTEC","description":"Mass Flow Controller\uff5cVaporizer\uff5cThe pioneer in flow control","url":"https:\/\/lintec-mfc.co.jp\/en\/","logo":{"@type":"ImageObject","url":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/#organizationLogo","width":2560,"height":189},"image":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/#organizationLogo"}},{"@type":"WebPage","@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/#webpage","url":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/","name":"DeviceNet Mass Flow Controller - LINTEC","description":"Mass flow controller for DeviceNet communication. MC-50","inLanguage":"ja","isPartOf":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/#website"},"breadcrumb":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/#breadcrumblist"},"datePublished":"2016-12-01T16:02:26+09:00","dateModified":"2024-03-25T10:57:55+09:00"},{"@type":"WebSite","@id":"https:\/\/lintec-mfc.co.jp\/en\/#website","url":"https:\/\/lintec-mfc.co.jp\/en\/","name":"LINTEC","description":"Mass Flow Controller\uff5cVaporizer\uff5cThe pioneer in flow control","inLanguage":"ja","publisher":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/#organization"}}]},"og:locale":"ja_JP","og:site_name":"LINTEC - Mass Flow Controller\uff5cVaporizer\uff5cThe pioneer in flow control","og:type":"article","og:title":"DeviceNet Mass Flow Controller - LINTEC","og:description":"Mass flow controller for DeviceNet communication. MC-50","og:url":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/","og:image":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg","og:image:secure_url":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg","article:published_time":"2016-12-01T07:02:26+00:00","article:modified_time":"2024-03-25T01:57:55+00:00","twitter:card":"summary","twitter:title":"DeviceNet Mass Flow Controller - LINTEC","twitter:description":"Mass flow controller for DeviceNet communication. MC-50","twitter:image":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg"},"aioseo_meta_data":{"post_id":"94","title":null,"description":null,"keywords":[],"keyphrases":{"focus":{"keyphrase":"","score":0,"analysis":{"keyphraseInTitle":{"score":0,"maxScore":9,"error":1}}},"additional":[]},"primary_term":null,"canonical_url":null,"og_title":null,"og_description":null,"og_object_type":"default","og_image_type":"default","og_image_url":null,"og_image_width":null,"og_image_height":null,"og_image_custom_url":null,"og_image_custom_fields":null,"og_video":"","og_custom_url":null,"og_article_section":null,"og_article_tags":[],"twitter_use_og":false,"twitter_card":"default","twitter_image_type":"default","twitter_image_url":null,"twitter_image_custom_url":null,"twitter_image_custom_fields":null,"twitter_title":null,"twitter_description":null,"schema":{"blockGraphs":[],"customGraphs":[],"default":{"data":{"Article":[],"Course":[],"Dataset":[],"FAQPage":[],"Movie":[],"Person":[],"Product":[],"ProductReview":[],"Car":[],"Recipe":[],"Service":[],"SoftwareApplication":[],"WebPage":[]},"graphName":"WebPage","isEnabled":true},"graphs":[]},"schema_type":"default","schema_type_options":null,"pillar_content":false,"robots_default":true,"robots_noindex":false,"robots_noarchive":false,"robots_nosnippet":false,"robots_nofollow":false,"robots_noimageindex":false,"robots_noodp":false,"robots_notranslate":false,"robots_max_snippet":"-1","robots_max_videopreview":"-1","robots_max_imagepreview":"large","priority":null,"frequency":"default","local_seo":null,"breadcrumb_settings":null,"limit_modified_date":false,"ai":null,"created":"2022-06-07 10:14:32","updated":"2026-05-15 01:45:29","seo_analyzer_scan_date":null},"aioseo_breadcrumb":"<div class=\"aioseo-breadcrumbs\"><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/lintec-mfc.co.jp\/en\" title=\"Home\">Home<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/\" title=\"Mass Flow Controller Operating Princinple\">Mass Flow Controller Operating Princinple<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/\" title=\"Gas Mass Flow Controller\/Meter\">Gas Mass Flow Controller\/Meter<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\tDeviceNet Mass Flow Controller\n\t\t<\/span><\/div>","aioseo_breadcrumb_json":[{"label":"Home","link":"https:\/\/lintec-mfc.co.jp\/en"},{"label":"Mass Flow Controller Operating Princinple","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/"},{"label":"Gas Mass Flow Controller\/Meter","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/"},{"label":"DeviceNet Mass Flow Controller","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/devicenet-mass-flow-controller\/"}],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/94","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=94"}],"version-history":[{"count":13,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/94\/revisions"}],"predecessor-version":[{"id":2531,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/94\/revisions\/2531"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=94"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}