{"id":92,"date":"2016-12-01T16:01:52","date_gmt":"2016-12-01T07:01:52","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=92"},"modified":"2024-03-25T13:06:40","modified_gmt":"2024-03-25T04:06:40","slug":"ethercat-mass-flow-controller","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/ethercat-mass-flow-controller\/","title":{"rendered":"EtherCAT Mass Flow Controller"},"content":{"rendered":"\n<p>High performance mass flow controller for EtherCAT communication.<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\">MC-5000C Series<\/h2>\n\n\n\n<p>High performance EtherCAT mass flow controller for semiconductor processes. It is compliant with SEMI standards and can be controlled by using the EtherCAT communication, which is used to speed up the transport system of semiconductor manufacturing equipment.<\/p>\n\n\n\n<p>This MFC has a full metal seal, which is a requirement in most semiconductor manufacturing processes, and Lintec&#8217;s unique <a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#ambient-temperature-compensated-flow-rate-sensor\" title=\"\"><span class=\"epb-underline\">ambient temperature compensated flow rate sensor<\/span><\/a>; liquefied gas operations are also possible with the \u201cliquified gas\u201d option.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image aligncenter size-large is-resized\"><img decoding=\"async\" loading=\"lazy\" src=\"https:\/\/lintec-mfc.co.jp\/wp-content\/uploads\/2020\/07\/EC.jpg\" alt=\"\" width=\"174\" height=\"44\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"661\" height=\"420\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000C.jpg\" alt=\"EtherCAT\u00ae Mass Flow Controller\nMC-5000C Series\" class=\"wp-image-1762\" srcset=\"https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-5000C.jpg 661w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-5000C-300x191.jpg 300w\" sizes=\"(max-width: 661px) 100vw, 661px\" \/><figcaption class=\"wp-element-caption\">MC-5000C<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-6\">\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Accuracy \u00b11% S.P.<\/li>\n\n\n\n<li>Metal seal<\/li>\n\n\n\n<li>Clean (zero particle structure)<\/li>\n\n\n\n<li>Ambient temperature sensor<\/li>\n\n\n\n<li>EtherCAT communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#0693e3\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(6, 147, 227, 0.7) 0);\">Option<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Micro Flow F.S.<\/li>\n\n\n\n<li>Compatible with liquefied gas<\/li>\n\n\n\n<li>Wide range<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Example of Use<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">Communication Unification of EtherCAT Communication Devices<\/h4>\n\n\n\n<p>EtherCAT communication (digital interface) is increasingly used in semiconductor manufacturing equipment for high-speed control of robot arms and other transport systems. 65,536 nodes are available for EtherCAT communication, enabling unification of all measurement and motion elements of the MFC with EtherCAT communication.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Specification Table<\/h3>\n\n\n\n<figure class=\"wp-block-table is-style-table__side epb-margin-top__8 has-small-font-size\"><table class=\"has-fixed-layout\"><thead><tr><th>Model<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5100C<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5200C<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5250C<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5460C<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5470C<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-5580C<\/th><\/tr><\/thead><tbody><tr><td>Flow rate in Nitrogen(Full scale)<\/td><td class=\"has-text-align-center\" data-align=\"center\">5\uff5e5,000SCCM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e20SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e50SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e150SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e200SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e300SLM<\/td><\/tr><tr><td>Flow rate control range<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"6\">2 \uff5e 100% F.S.<\/td><\/tr><tr><td>Accuracy<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"3\">100\uff5e25% F.S. \u00b11.0%S.P.<br>25%\uff5e2% F.S. \u00b10.25% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">100\uff5e35% F.S. \u00b11.0%S.P.<br>35%\uff5e2% F.S. \u00b10.35% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">1% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">2% F.S.<\/td><\/tr><tr><td>Operating differential pressure<\/td><td class=\"has-text-align-center\" data-align=\"center\">50 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">100 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">150 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">250 \uff5e 500kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">350 \uff5e 500kPa<\/td><\/tr><tr><td>Temperature<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"6\">5 \uff5e 50\u2103<\/td><\/tr><tr><td>Seal materials<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"6\">Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000C-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"MC-5000C Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-3c90dd30-c51b-4339-a532-0ca37783cf49\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000C-Series.pdf\">MC-5000C Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-5000C-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-3c90dd30-c51b-4339-a532-0ca37783cf49\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>High performance mass flow controller for EtherCAT communication. MC-5000C Series High performance EtherCAT ma [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":13,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/92"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=92"}],"version-history":[{"count":23,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/92\/revisions"}],"predecessor-version":[{"id":2711,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/92\/revisions\/2711"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=92"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}