Low differential pressure mass flow controller with a minimum operating differential pressure of 800 Pa.<\/p>\n\n\n\n
Pressure loss is reduced with a unique ambient temperature compensated flow rate sensor<\/span><\/a> with low pressure loss specifications and an accuracy of \u00b11%F.S.<\/p>\n\n\n\nProprietary piezo actuator valve provides precise flow control and stability with low differential pressure.<\/p>\n<\/div>\n\n\n\n\nMC-3000S<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n\n\nFeature<\/span><\/h3>\n\n\n\n\nLow differential pressure (800 Pa)<\/li>\n\n\n\nOperating temperature 5 to 50\u00b0C<\/li>\n\n\n\nMetal seal<\/li>\n\n\n\nClean(zero particle structure)<\/li>\n\n\n\nAmbient temperature compensated sensor<\/li>\n\n\n\nRS-485 communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n\nOption<\/span><\/h3>\n\n\n\n\nMicro flow F.S.<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\nExample of Use<\/h3>\n\n\n\nFlow control of low vapor pressure gas at low temperature<\/strong><\/h4>\n\n\n\nThe MC-3000S is a low differential pressure mass flow controller that uses a unique low pressure loss structure to control the flow rate of liquid raw materials such as H2O even at normal temperatures, as long as the downstream is in a vacuum state. It is recommended for ITO sputtering methods that require a small amount of water vapor to be flown into the vacuum chamber. In addition, it is possible to control the flow rate of solid materials at normal temperature with low vapor pressure, such as XeF2.<\/p>\n\n\n\nFlow control of gases supplied from reduced pressure tank containers (SDS container)<\/strong><\/h4>\n\n\n\nIon implantation tools use special material gases such as AsH3 and PH3, which are often supplied from Safe Delivery Source (SDS) containers for safety and stability reasons. The inner pressure of the SDS containers is lower than the atmospheric pressure, and thus a low pressure MFC is required to control the flow rate. MC-3000S\u2019 unique low pressure drop structure allows flow control at a minimum differential pressure of 800Pa (6Torr).<\/p>\n\n\n\nSpecification Table<\/h3>\n\n\n\nModel<\/th>MC-3102S<\/th><\/tr><\/thead>Flow rate in Nitrogen(Full scale)<\/td>2 \uff5e 10SCCM<\/td>\uff5e 20SCCM<\/td>\uff5e 30SCCM<\/td><\/tr>Flow rate control range<\/td>2 \uff5e 100% F.S.<\/td><\/tr>Accuracy<\/td>\u00b11.0% F.S.<\/td><\/tr>Operating differential pressure<\/td>8\u00d7102Pa \uff5e 1.33\u00d7105Pa<\/td>1.07\u00d7103Pa \uff5e 1.33\u00d7105Pa<\/td>1.33\u00d7103Pa \uff5e 1.33\u00d7105Pa<\/td><\/tr>Temperature<\/td>5 \uff5e 50\u2103<\/td><\/tr>Seal materials<\/td>Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<\/object>MC-3000S Series<\/a>Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"Low differential pressure mass flow controller with a minimum operating differential pressure of 800 Pa. MC-30 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":11,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/90"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=90"}],"version-history":[{"count":16,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/90\/revisions"}],"predecessor-version":[{"id":2526,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/90\/revisions\/2526"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=90"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
Proprietary piezo actuator valve provides precise flow control and stability with low differential pressure.<\/p>\n<\/div>\n\n\n\n
The MC-3000S is a low differential pressure mass flow controller that uses a unique low pressure loss structure to control the flow rate of liquid raw materials such as H2O even at normal temperatures, as long as the downstream is in a vacuum state. It is recommended for ITO sputtering methods that require a small amount of water vapor to be flown into the vacuum chamber. In addition, it is possible to control the flow rate of solid materials at normal temperature with low vapor pressure, such as XeF2.<\/p>\n\n\n\n
Ion implantation tools use special material gases such as AsH3 and PH3, which are often supplied from Safe Delivery Source (SDS) containers for safety and stability reasons. The inner pressure of the SDS containers is lower than the atmospheric pressure, and thus a low pressure MFC is required to control the flow rate. MC-3000S\u2019 unique low pressure drop structure allows flow control at a minimum differential pressure of 800Pa (6Torr).<\/p>\n\n\n\n
Low differential pressure mass flow controller with a minimum operating differential pressure of 800 Pa. MC-30 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":11,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/90"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=90"}],"version-history":[{"count":16,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/90\/revisions"}],"predecessor-version":[{"id":2526,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/90\/revisions\/2526"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=90"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
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