{"id":88,"date":"2016-12-01T15:59:41","date_gmt":"2016-12-01T06:59:41","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=88"},"modified":"2024-03-25T10:09:25","modified_gmt":"2024-03-25T01:09:25","slug":"high-temperature-mass-flow-controller","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/high-temperature-mass-flow-controller\/","title":{"rendered":"High Temperature Mass Flow Controller"},"content":{"rendered":"\n<p>Mass flow controller for high temperature applications that can be used in environments with the maximum operation temperature 120\u2103 (150\u2103 when not energized).<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\">MC-3000L-TC Series<\/h2>\n\n\n\n<p>Gas control at high temperature is possible by separating the wetted part and the circuit board part&nbsp; which is sensitive to heat.<\/p>\n\n\n\n<p>SUS-316L is used for the block and Au is used for the sealing material, making it compatible with corrosive gases.<\/p>\n\n\n\n<p>Low differential pressure specification that prevents condensation of liquified gas and MFC special heater block to heat up the wetted part are also available as options.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full is-resized\"><img decoding=\"async\" loading=\"lazy\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-TC.jpg\" alt=\"High Temperature Mass Flow Controller\nMC-3000L-TC Series\" class=\"wp-image-1760\" width=\"368\" height=\"146\" srcset=\"https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-TC.jpg 1006w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-TC-300x119.jpg 300w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-TC-768x305.jpg 768w\" sizes=\"(max-width: 368px) 100vw, 368px\" \/><figcaption class=\"wp-element-caption\">High Temperature Mass Flow Controller \u3010MC-3000L-TC\u3011<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-6\">\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Operating temperature Max 120\u00b0C<\/li>\n\n\n\n<li>Metal seal<\/li>\n\n\n\n<li>Clean (zero particle structure)<\/li>\n\n\n\n<li>RS-485 communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#0693e3\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(6, 147, 227, 0.7) 0);\">Option<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Liquefied Gas Compatible<\/li>\n\n\n\n<li>Heater block<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Example of Use<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">Liquefied gas, sublimation gas flow control<\/h4>\n\n\n\n<p>The precursor gases for CVD and ALD are not always at the normal temperature and pressure. Liquids and solid materials generate less gas at normal temperatures, making it difficult to control the flow rate with MFCs that use <a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/mfc-term\/#operating-differential-pressure\" title=\"\"><span class=\"epb-underline\">differential pressure<\/span><\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/mfc-term\/mass-flow-controllers-and-mass-flow-meters\/#differential-pressure\" title=\"\"> <\/a>to flow gas. Therefore, the operating pressure of the MFC is secured by heating the raw material tank and increasing the vapor pressure to generate differential pressure. MC-3000L-TC, which is capable of flow control at high temperatures and low differential pressure, is ideal for controlling the flow rate of liquefied gas and sublimated gas.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Specification Table<\/h3>\n\n\n\n<figure class=\"wp-block-table is-style-table__side epb-margin-top__8\"><table class=\"has-fixed-layout\"><thead><tr><th class=\"has-text-align-left\" data-align=\"left\">Model<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-3102L-TC<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-3202L-TC<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-left\" data-align=\"left\">Flow rate in Nitrogen(Full scale)<\/td><td class=\"has-text-align-center\" data-align=\"center\">10 \uff5e 5,000SCCM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e 25SLM<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">Flow rate control range<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">2 \uff5e 100% F.S.<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">Accuracy<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">\u00b11.0% F.S.<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">Operating differential pressure<\/td><td class=\"has-text-align-center\" data-align=\"center\">50 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">150 \uff5e 300kPa<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">Temperature<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">L\uff1a80 \uff5e 100\u2103<br>H\uff1a100 \uff5e 120\u2103<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">Seal materials<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-TC-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"MC-3000L-TC Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-65b5030c-9271-4205-9c02-692f9b3a3c07\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-TC-Series.pdf\">MC-3000L-TC Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-TC-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-65b5030c-9271-4205-9c02-692f9b3a3c07\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Mass flow controller for high temperature applications that can be used in environments with the maximum opera [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":9,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/88"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=88"}],"version-history":[{"count":16,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/88\/revisions"}],"predecessor-version":[{"id":2525,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/88\/revisions\/2525"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=88"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}