{"id":86,"date":"2016-12-01T15:58:57","date_gmt":"2016-12-01T06:58:57","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=86"},"modified":"2024-03-25T11:57:50","modified_gmt":"2024-03-25T02:57:50","slug":"high-performance-digital-mass-flow-controller","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/high-performance-digital-mass-flow-controller\/","title":{"rendered":"High Performance Digital Mass Flow Controller"},"content":{"rendered":"\n<p>High performance digital mass flow controller with guaranteed \u00b11% S.P. accuracy.<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\">MC-3000L Series<\/h2>\n\n\n\n<p>Lintec&#8217;s unique <a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#ambient-temperature-compensated-flow-rate-sensor\" title=\"\"><span class=\"epb-underline\">ambient temperature compensated flow rate sensor<\/span><\/a> enables highly accurate flow measurement even at low temperatures. It suppresses the heat aging of the sensor and allows flow rate control even for highly decomposable gases such as ozone.<\/p>\n\n\n\n<p><\/p>\n\n\n\n<p>This high performance and omnipotent digital mass flow controller has various options available for selection: liquefied gas, micro flow rate F.S., wide range, custom spacing length or fitting type etc.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full is-resized\"><img decoding=\"async\" loading=\"lazy\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L.jpg\" alt=\"\" class=\"wp-image-1759\" width=\"368\" height=\"212\" srcset=\"https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-3000L.jpg 727w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-300x173.jpg 300w\" sizes=\"(max-width: 368px) 100vw, 368px\" \/><figcaption class=\"wp-element-caption\">MC-3000L<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-6\">\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Accuracy \u00b11%S.P.<\/li>\n\n\n\n<li>Operating temperature 5 to 50\u00b0C<\/li>\n\n\n\n<li>Metal seal<\/li>\n\n\n\n<li>Clean (zero particle structure)<\/li>\n\n\n\n<li>Ambient temperature sensor<\/li>\n\n\n\n<li>RS-485 communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#0693e3\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(6, 147, 227, 0.7) 0);\">Option<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Micro Flow F.S.<\/li>\n\n\n\n<li>Compatible with liquefied gas<\/li>\n\n\n\n<li>Wide range<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Example of Use<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\">Semiconductor manufacturing front-end process<\/h4>\n\n\n\n<p>Since highly reactive gases are used in deposition equipment, such as CVD (Chemical Vapor Deposition), ALD (Atomic Layer Deposition) and etching equipment, a gas mass flow controller with a highly corrosion resistant metal seal is essential.<\/p>\n\n\n\n<p>In addition, many precursor gases at normal temperature and pressure only exist in liquid state, so it is important to have a heat-resistant valve with a structure designed to prevent liquefaction of the precursor gas. The high-precision mass flow controller MC-3000L has liquefied gas compatible options and a maximum operating temperature of 50\u2103 (55\u2103 with the option).<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">Analyzer<\/h4>\n\n\n\n<p>Analyzers are sometimes required to control micro low flow rates, but the 5SCCM minimum F.S. of most conventional mass flow controllers don\u2019t allow these kind of operations. High-precision mass flow controller MC-3000L can be manufactured with 1SCCM F.S. or less as an option. Please contact us for details.<\/p>\n\n\n\n<p>In addition, the high-precision mass flow controller MC-3000L is equipped with a diaphragm valve with small dead volume as the standard.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Specification Table<\/h3>\n\n\n\n<figure class=\"wp-block-table is-style-table__side epb-margin-top__8 has-small-font-size\"><table class=\"has-fixed-layout\"><thead><tr><th>Model<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-3102L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-3202L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-3202L<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-3252L<\/th><th>MC-3452L<\/th><th>MC-3462L<\/th><th>MC-3472L<\/th><\/tr><\/thead><tbody><tr><td>Flow rate in Nitrogen(Full scale)<\/td><td class=\"has-text-align-center\" data-align=\"center\">5\uff5e5,000SCCM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e20SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e50SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e50SLM<\/td><td>\uff5e150SLM<\/td><td>\uff5e200SLM<\/td><td>\uff5e400SLM<\/td><\/tr><tr><td>Flow rate control range<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"7\">2 \uff5e 100% F.S.<\/td><\/tr><tr><td>Accuracy<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"3\">100\uff5e25% F.S. \u00b11.0%S.P.<br>25%\uff5e2% F.S. \u00b10.25% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">100\uff5e35% F.S. \u00b11.0%S.P.<br>35%\uff5e2% F.S. \u00b10.35% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">1% F.S.<\/td><td class=\"has-text-align-center\" data-align=\"center\">2% F.S.<\/td><\/tr><tr><td>Operating differential pressure<\/td><td class=\"has-text-align-center\" data-align=\"center\">50 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><td class=\"has-text-align-center\" data-align=\"center\">150 \uff5e 500kPa<\/td><td>250 \uff5e 500kPa<\/td><td>300 \uff5e 500kPa<\/td><td>350 \uff5e 500kPa<\/td><\/tr><tr><td>Temperature<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"7\">5 \uff5e 50\u2103<\/td><\/tr><tr><td>Seal materials<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"7\">Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"MC-3000L Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-340dc074-120f-4006-a6d5-5ab2cb650ad1\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-Series.pdf\">MC-3000L Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-3000L-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-340dc074-120f-4006-a6d5-5ab2cb650ad1\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>High performance digital mass flow controller with guaranteed \u00b11% S.P. accuracy. MC-3000L Series Lintec&#8217; [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":7,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/86"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=86"}],"version-history":[{"count":23,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/86\/revisions"}],"predecessor-version":[{"id":2524,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/86\/revisions\/2524"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=86"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}