{"id":34,"date":"2016-12-01T14:59:34","date_gmt":"2016-12-01T05:59:34","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=34"},"modified":"2023-12-07T09:56:24","modified_gmt":"2023-12-07T00:56:24","slug":"gas","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/","title":{"rendered":"Gas Mass Flow Controller\/Meter"},"content":{"rendered":"\n

Lintec’s gas flow control and measurement products<\/h2>\n\n\n\n

Mass Flow Controller<\/h3>\n\n\n\n
Feature<\/th>Model<\/th>Communication standard
Power source<\/th>		Temperature
Response speed
Accuracy<\/th>		Keywords
Usage<\/th><\/tr><\/thead>
\"MC-7000\"<\/a>
High-speed MFC<\/strong><\/a><\/td>		MC-7000<\/td>DeviceNet
EtherCAT
DC24V power supply<\/td>		5~50\u2103
0.2sec
\u00b11.0%S.P.<\/td>		Semiconductor
Film deposition
ALD<\/td><\/tr>
\"MC-5000C\"<\/a>
EtherCAT MFC<\/a><\/strong><\/td>		MC-5000C<\/td>EtherCAT
DC24V power supply<\/td>		5~50\u2103
1sec
\u00b11.0%S.P.<\/td>		Semiconductor
Film deposition
ALD<\/td><\/tr>
\"MC-5000L\"<\/a>
DeviceNet MFC<\/a><\/strong><\/td>		MC-5000L<\/td>DeviceNet
DC24V power supply<\/td>		5~50\u2103
1sec
\u00b11.0%S.P.<\/td>		Semiconductor
Film deposition
ALD<\/td><\/tr>
\"MC-3000L\"<\/a>
Digital MFC<\/a><\/strong><\/td>		MC-3000L<\/td>RS-485
Analog 0~5V
\u00b115V power supply<\/td>		5~50\u2103
1sec
\u00b11.0%S.P.<\/td>		Semiconductor
Film deposition
Analyzers<\/td><\/tr>
\"MC-3000L<\/a>
High-temperature MFC<\/strong><\/a><\/td>		MC-3000L-TC<\/td>RS-485
Analog 0~5V
\u00b115V power supply<\/td>		Max120\u2103
1sec
\u00b11.0%F.S.<\/td>		Semiconductor
Film deposition
Liquefied gas
Analyzers<\/td><\/tr>
\"MC-3000S\"<\/a>
Low differential pressure MFC<\/strong><\/a><\/td>		MC-3000S<\/td>RS-485
Analog 0~5V
\u00b115V power supply<\/td>		5~50\u2103
1sec
\u00b11.0%F.S.<\/td>		Semiconductor
Film deposition
Liquefied gas
Solid sublimation<\/td><\/tr>
\"MC-700\"<\/a>
Variable MFC<\/a><\/strong><\/td>		MC-700<\/td>RS-485
Analog 0~5V
\u00b115V power supply<\/td>		15~35\u2103
1sec
\u00b11.0%F.S.<\/td>		Semiconductor
Film deposition
Analyzers<\/td><\/tr>
\"MC-10\"<\/a>
Low-cost MFC<\/a><\/strong><\/td>		MC-10<\/td>RS-485(option)
Analog 0~5V
\u00b115V power supply<\/td>		15~35\u2103
1sac
\u00b11.0%F.S.<\/td>		Inert gas
Analyzers<\/td><\/tr><\/tbody><\/table>
Mass flow controller product list<\/strong><\/figcaption><\/figure>\n\n\n\n

Mass Flow Meter<\/h3>\n\n\n\n
Feature<\/th>Model<\/strong><\/th>Communication standard
Power source<\/th>		Temperature
Accuracy<\/th>		Keywords
Usage<\/th><\/tr><\/thead>
\"\u9ad8\u7cbe\u5ea6\u30de\u30b9\u30d5\u30ed\u30fc\u30e1\u30fc\u30bf\u30fc\"<\/a>
Digital MFM<\/a><\/strong><\/td>		MM-3000L<\/td>RS-485
Analog 0~5V
\u00b115V power supply<\/td>		5~50\u2103
\u00b11.0%S.P.<\/td>		Semiconductor
Film deposition
Analyzers<\/td><\/tr>
\"\u9ad8\u6e29\u30de\u30b9\u30d5\u30ed\u30fc\u30e1\u30fc\u30bf\u2015\"<\/a>
High-temperature MFM<\/a><\/strong><\/td>		MM-3000L-TN<\/td>RS-485
Analog 0~5V
\u00b115V power supply<\/td>		Max120\u2103
\u00b11.0%F.S.<\/td>		Semiconductor
Film deposition
Liquefied gas
Analyzers<\/td><\/tr><\/tbody><\/table>
Mass flow meter product list<\/strong><\/figcaption><\/figure>\n\n\n\n

Control Valve<\/h3>\n\n\n\n
Feature<\/th>Model<\/strong><\/th>Power source<\/th>Temperature
Response speed<\/th>		Keywords
Usage<\/th><\/tr><\/thead>
\"\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30d0\u30eb\u30d6\"<\/a>
Control valve<\/a><\/strong><\/td>		CV-3000L<\/td>0\uff5e5V<\/td>0~50\u2103
0.5sec<\/td>		Primary pressure control
Back pressure control
Bubbling<\/td><\/tr><\/tbody><\/table>
Control valve product list<\/strong><\/figcaption><\/figure>\n","protected":false},"excerpt":{"rendered":"

Lintec’s gas flow control and measurement products Mass Flow Controller Feature Model Communication stan […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":32,"menu_order":1,"comment_status":"closed","ping_status":"closed","template":"","meta":{"emanon_ad_label_edit":"initial","emanon_hide_header":"","emanon_hide_header_menu":"","emanon_hide_header_menu_sp":"","emanon_hide_featured_image":"0","emanon_disabled_overlay":"0","emanon_hide_title":"0","emanon_hide_sidebar":"0","emanon_hide_breadcrumb":"0","emanon_hide_toc":"0","emanon_hide_sns":"0","emanon_hide_follow":"0","emanon_hide_ad":"0","emanon_disabled_background_color":"0","emanon_hide_content_margin_top":"","emanon_hide_content_margin_bottom":"0","emanon_hide_left_right_margin_sp":"0","emanon_hide_footer_section":"0","emanon_hide_footer":"","emanon_hide_fixed_sidebar_menu":"","emanon_hide_floating_hamburger_menu":"0","emanon_hide_hamburger_menu_pc":"","emanon_hide_hamburger_menu_sp_tb":"","emanon_hide_fixed_footer_menu":"0","emanon_one_column_width":"","emanon_subtitle":"","emanon_cta_cv_type":"cta-cv-not","emanon_cta_floating_cv_type":"cta-cv-not","emanon_cta_newsletter_cv_type":"cta-cv-not","emanon_cta_id":"","emanon_cta_floating_id":"","emanon_cta_newsletter_id":"","emanon_noindex":"0","emanon_nofollow":"0","emanon_meta_description":"","get_emanon_structured_data_profile_page_name":[],"emanon_custom_footer_shortcode":"","emanon_custom_header_shortcode":"","footnotes":""},"class_list":["post-34","page","type-page","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t\n\t\n\t\n\t\n\t\n\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t