{"id":2696,"date":"2024-12-26T11:19:11","date_gmt":"2024-12-26T02:19:11","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=2696"},"modified":"2025-01-17T14:37:13","modified_gmt":"2025-01-17T05:37:13","slug":"ozone-mass-flow-controller-oz-1","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/ozone-mass-flow-controller-oz-1\/","title":{"rendered":"Ozone Mass Flow Controller OZ-1"},"content":{"rendered":"\n<div class=\"wp-block-columns are-vertically-aligned-center is-layout-flex wp-container-4\">\n<div class=\"wp-block-column is-vertically-aligned-center is-layout-flow\" style=\"flex-basis:100%\">\n<div class=\"wp-block-group is-layout-constrained\">\n<div class=\"wp-block-group is-layout-constrained\">\n<p class=\"has-text-align-left\">Mass Flow Controller with One-Year Guarantee for Ozone Gas<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-9\">\n<div class=\"wp-block-column is-layout-flow\">\n<p>Lintec\u2019s unique<span class=\"epb-underline-hover\"> <a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#ambient-temperature-compensated-flow-rate-sensor\" target=\"_blank\" rel=\"noopener\" title=\"\">ambient temperature-compensated sensor<\/a> <\/span>ensures highly accurate flow measurement, even at low temperatures. This controller ensures stable flow control of thermally decomposable ozone gas without changing its concentration over long-term use. (Based on our research)<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<div class=\"wp-block-columns is-layout-flex wp-container-7\">\n<div class=\"wp-block-column is-layout-flow\" style=\"flex-basis:100%\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"703\" height=\"466\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2024\/12\/da7e06d38f55c77fb70c1a79e03e9791-4.png\" alt=\"\" class=\"wp-image-2703\" srcset=\"https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2024\/12\/da7e06d38f55c77fb70c1a79e03e9791-4.png 703w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2024\/12\/da7e06d38f55c77fb70c1a79e03e9791-4-300x199.png 300w\" sizes=\"(max-width: 703px) 100vw, 703px\" \/><\/figure>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-12\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><br><\/h2>\n\n\n\n<ul>\n<li>Enables ozone gas flow control<\/li>\n\n\n\n<li>Accuracy: \u00b11% S.P. (calibrated gas)<\/li>\n\n\n\n<li>Clean (particle-guaranteed)<\/li>\n\n\n\n<li><a href=\"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/#ambient-temperature-compensated-flow-rate-sensor\" title=\"Ambient temperature compensation sensor\">Ambient temperature compensation sensor<\/a><\/li>\n\n\n\n<li>Supports EtherCAT and DeviceNet communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\"><span data-color=\"#0693e3\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(6, 147, 227, 0.7) 0);\">Option<\/span><br><\/h2>\n\n\n\n<ul>\n<li>Low differential pressure compatible <\/li>\n\n\n\n<li>Wide range<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Example of Use<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">Supplies ozone from a generator to multiple CVD and cleaning systems.<\/h2>\n\n\n\n<p>Ozone\u2019s high corrosiveness has traditionally made flow control with MFCs difficult, requiring one ozone generator per demand point. However, with the OZ-1 Ozone Gas Mass Flow Controller, which minimizes thermal decomposition during flow measurement, a single ozone generator can now supply multiple demand points.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Specification Table<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table><tbody><tr><td>Temperature<\/td><td>Min operating diff pressure<\/td><td>Max operating diff pressure<\/td><td>Accuracy<\/td><td>Control Range<\/td><td>Min <br>F.S.<\/td><td>Max F.S.<\/td><\/tr><tr><td>5\uff5e50\u2103<\/td><td>50kPa<\/td><td>300kPa<\/td><td>\u00b11%S.P.<\/td><td>2~100%F.S.<\/td><td>10SCCM<\/td><td>50SLM<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2025\/01\/OZ-1-Ozone-Mass-Flow-Controller-1.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"OZ-1-Ozone-Mass-Flow-Controller-1\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-011f8cab-29f7-41e9-b4b2-04b66b15304b\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2025\/01\/OZ-1-Ozone-Mass-Flow-Controller-1.pdf\">OZ-1-Ozone-Mass-Flow-Controller-1<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2025\/01\/OZ-1-Ozone-Mass-Flow-Controller-1.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-011f8cab-29f7-41e9-b4b2-04b66b15304b\">\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Mass Flow Controller with One-Year Guarantee for Ozone Gas Lintec\u2019s unique ambient temperature-compensated sen [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/2696"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=2696"}],"version-history":[{"count":8,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/2696\/revisions"}],"predecessor-version":[{"id":2723,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/2696\/revisions\/2723"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=2696"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}