{"id":1961,"date":"2023-07-23T23:22:52","date_gmt":"2023-07-23T14:22:52","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1961"},"modified":"2024-03-25T16:45:12","modified_gmt":"2024-03-25T07:45:12","slug":"non-carrier-vaporizer-vu-3000","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/non-carrier-vaporizer-vu-3000\/","title":{"rendered":"Non-carrier vaporizer [VU-3000]"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<p>VU-3000 is a clean structure vaporizer that does not require carrier gas.<\/p>\n\n\n\n<p>Constantly controlled liquid is diffused to the mesh filter at the entrance of the vaporization chamber. Stable liquid vapor supply is guaranteed even without carrier gas.<\/p>\n\n\n\n<p>The maximum temperature can be set up to 200\u2103, realizing non-carrier gas vaporization supply of various liquid materials including H2O.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"235\" height=\"399\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3000.jpg\" alt=\"Non-carrier vaporizer [VU-3000]\" class=\"wp-image-1890\" srcset=\"https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/VU-3000.jpg 235w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/VU-3000-177x300.jpg 177w\" sizes=\"(max-width: 235px) 100vw, 235px\" \/><figcaption class=\"wp-element-caption\">Non-carrier vaporizer [VU-3000]<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-5\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h2>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Non-Carrier Vaporization<\/li>\n\n\n\n<li>Easy maintenance<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Example of Use<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">Ashing and Cleaning<\/h3>\n\n\n\n<p>For wafer cleaning applications, such as ashing (oxidation), H2O is usually supplied via the baking vaporization method using a high temperature MFC.<\/p>\n\n\n\n<p>However, this method has restrictions on the downstream line conditions (reduced pressure) and flow rate. VU-3000 enables supply of H2O at 5g\/min (6.2SLM)&nbsp; without the carrier gas and regardless of the downstream line conditions.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Atmospheric pressure evaluation with H2O gas<\/h3>\n\n\n\n<p>Accurate supply of H2O vapor gas is possible due to momentary vaporization ability of the vaporizer and precise control of a liquid mass flow controller. H2O gas can be supplied at atmospheric pressure conditions for various applications, such as fuel cells evaluation.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Specification Table<\/h2>\n\n\n\n<figure class=\"wp-block-table epb-margin-top__8\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">Max. temperature<\/th><th class=\"has-text-align-center\" data-align=\"center\">Max H2O vaporization<\/th><th class=\"has-text-align-center\" data-align=\"center\">Wetted materials<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">200\u2103<\/td><td class=\"has-text-align-center\" data-align=\"center\">5g\/min<\/td><td class=\"has-text-align-center\" data-align=\"center\">SUS316L, Karlez\u00ae, Polyimide, Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3000-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"VU-3000 Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3000-Series.pdf\">VU-3000 Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3000-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>VU-3000 is a clean structure vaporizer that does not require carrier gas. Constantly controlled liquid is diff [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1961"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1961"}],"version-history":[{"count":3,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1961\/revisions"}],"predecessor-version":[{"id":2554,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1961\/revisions\/2554"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1961"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}