{"id":1952,"date":"2023-07-23T23:12:16","date_gmt":"2023-07-23T14:12:16","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1952"},"modified":"2024-03-25T16:44:31","modified_gmt":"2024-03-25T07:44:31","slug":"vu-3100","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/vu-3100\/","title":{"rendered":"Compact non-carrier vaporizer [VU-3100]"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<p>Compact non-carrier vaporizer with piezo actuator.<\/p>\n\n\n\n<p>A fast response piezo actuator control valve for low flow rates controls the liquid flow in the direct vicinity of the vaporization chamber.<\/p>\n\n\n\n<p>The flow-controlled liquid is diffused through a mesh filter and heated in the vaporization chamber to achieve stable vaporization even at minute flow rates.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"239\" height=\"400\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3100N.jpg\" alt=\"Small non-carrier vaporizer\" class=\"wp-image-1891\" srcset=\"https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/VU-3100N.jpg 239w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/VU-3100N-179x300.jpg 179w\" sizes=\"(max-width: 239px) 100vw, 239px\" \/><figcaption class=\"wp-element-caption\">Small non-carrier vaporizer<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-5\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h2>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Non-Carrier Vaporization<\/li>\n\n\n\n<li>Low flow vaporization<\/li>\n\n\n\n<li>Close proximity valve structure<\/li>\n\n\n\n<li>Space saving<\/li>\n\n\n\n<li>Easy maintenance<\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Example of Use<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">Non-Carrier Vaporization of TEOS<\/h3>\n\n\n\n<p class=\"epb-margin-top__8\">The main disadvantage of non-carrier gas vaporization method using high-temperature MFC is that the low vaporization flow rate capacity.<br>Addressing this issue, Lintec\u2019s original non-carrier gas vaporizer VU-3100 is capable of supplying non-carrier vaporization of TEOS: 5g\/min (538SCCM) while being compact.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Specification Table<\/h2>\n\n\n\n<figure class=\"wp-block-table epb-margin-top__8\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">Max. temperature<\/th><th class=\"has-text-align-center\" data-align=\"center\">Max TEOS vaporization<\/th><th class=\"has-text-align-center\" data-align=\"center\">Wetted materials<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">150\u2103<\/td><td class=\"has-text-align-center\" data-align=\"center\">5g\/min<\/td><td class=\"has-text-align-center\" data-align=\"center\">SUS316L, PEEK\u00ae, Ni-Co, PTFE, Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3000-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"VU-3000 Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3000-Series.pdf\">VU-3000 Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-3000-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Compact non-carrier vaporizer with piezo actuator. A fast response piezo actuator control valve for low flow r [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":9,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1952"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1952"}],"version-history":[{"count":3,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1952\/revisions"}],"predecessor-version":[{"id":2553,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1952\/revisions\/2553"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1952"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}