{"id":1937,"date":"2023-07-23T22:35:37","date_gmt":"2023-07-23T13:35:37","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1937"},"modified":"2024-03-25T11:55:40","modified_gmt":"2024-03-25T02:55:40","slug":"vu-440","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/","title":{"rendered":"High-efficiency Vaporizer [VU-440]"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-679ddeda wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p class=\"wp-block-paragraph\">This latest model adopts a highly efficient double fluid nozzle structure, expands the vaporization chamber, and suppresses unvaporized gas by improving the vaporization outlet.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Compared to the VU-450, this vaporizer has improved convection time and heat exchange area due to the enlarged volume of the vaporization chamber. Achieves high flow vaporization.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">By lengthening the distance to the gas outlet, the risk of unvaporized mist emission is suppressed.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Suitable for low vapor pressure precursors, as well as for high flow rate vaporization of Low-k &amp; High-k precursors, various metals, etc.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Because it is a valve-integrated vaporizer, it can be combined with the LM-3000L to control the liquid flow rate near the vaporizer. This way, vaporization flow rate control with high responsiveness is possible.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"237\" height=\"400\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-0440N.jpg\" alt=\"High Efficiency Vaporizer [VU-440]\" class=\"wp-image-1885\" srcset=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-0440N.jpg 237w, https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-0440N-178x300.jpg 178w\" sizes=\"auto, (max-width: 237px) 100vw, 237px\" \/><figcaption class=\"wp-element-caption\">High Efficiency Vaporizer [VU-440]<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h2>\n\n\n\n<ul class=\"epb-margin-top__8 wp-block-list\">\n<li>Highly efficient vaporization<\/li>\n\n\n\n<li>Easy maintenance<\/li>\n\n\n\n<li>Close proximity valve structure<\/li>\n\n\n\n<li>Increase the distance to the heating outlet<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Example of Use<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">Vaporization supply of semiconductor materials (CVD, ALD)<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">By enlarging the vaporization chamber, the mist atomized from the central double fluid nozzle spreads more compared the VU-450. By increasing the power of heater, it is possible to vaporize higher flow rates of liquids, 30g\/min in TEOS or 5g\/min in H2O conversion at high stability.<\/p>\n\n\n\n<figure class=\"wp-block-table epb-margin-top__8\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">Max. temperature<\/th><th class=\"has-text-align-center\" data-align=\"center\">Carrier gas flow<\/th><th class=\"has-text-align-center\" data-align=\"center\">Max TEOS vaporization<br>Max H2O vaporization<\/th><th class=\"has-text-align-center\" data-align=\"center\">Seal materials<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">200\u2103<\/td><td class=\"has-text-align-center\" data-align=\"center\">0.8~130SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">30g\/min<br>5g\/min<\/td><td class=\"has-text-align-center\" data-align=\"center\">Au,Karlez\u00ae<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div data-wp-interactive=\"core\/file\" class=\"wp-block-file\"><object data-wp-bind--hidden=\"!state.hasPdfPreview\" hidden class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-440-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"VU-440 Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-440-Series.pdf\">VU-440 Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-440-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>This latest model adopts a highly efficient double fluid nozzle structure, expands the vaporization chamber, a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1442,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":{"emanon_ad_label_edit":"initial","emanon_hide_header":"","emanon_hide_header_menu":"","emanon_hide_header_menu_sp":"","emanon_hide_featured_image":"0","emanon_disabled_overlay":"0","emanon_hide_title":"0","emanon_hide_sidebar":"0","emanon_hide_breadcrumb":"0","emanon_hide_toc":"0","emanon_hide_sns":"0","emanon_hide_follow":"0","emanon_hide_ad":"0","emanon_disabled_background_color":"0","emanon_hide_content_margin_top":"","emanon_hide_content_margin_bottom":"0","emanon_hide_left_right_margin_sp":"0","emanon_hide_footer_section":"0","emanon_hide_footer":"","emanon_hide_fixed_sidebar_menu":"","emanon_hide_floating_hamburger_menu":"0","emanon_hide_hamburger_menu_pc":"","emanon_hide_hamburger_menu_sp_tb":"","emanon_hide_fixed_footer_menu":"0","emanon_one_column_width":"","emanon_subtitle":"","emanon_cta_cv_type":"cta-cv-not","emanon_cta_floating_cv_type":"cta-cv-not","emanon_cta_newsletter_cv_type":"cta-cv-not","emanon_cta_id":"","emanon_cta_floating_id":"","emanon_cta_newsletter_id":"","emanon_noindex":"0","emanon_nofollow":"0","emanon_meta_description":"","get_emanon_structured_data_profile_page_name":[],"emanon_custom_footer_shortcode":"","emanon_custom_header_shortcode":"","footnotes":""},"class_list":["post-1937","page","type-page","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t<!-- All in One SEO 4.9.9 - aioseo.com -->\n\t<meta name=\"description\" content=\"This latest model adopts a highly efficient double flui\" \/>\n\t<meta name=\"robots\" content=\"max-image-preview:large\" \/>\n\t<meta name=\"google-site-verification\" content=\"google-site-verification: google6b6d5b4c5998acdc.html\" \/>\n\t<link rel=\"canonical\" href=\"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/\" \/>\n\t<meta name=\"generator\" content=\"All in One SEO (AIOSEO) 4.9.9\" \/>\n\t\t<meta property=\"og:locale\" content=\"ja_JP\" \/>\n\t\t<meta property=\"og:site_name\" content=\"LINTEC - Mass Flow Controller\uff5cVaporizer\uff5cThe pioneer in flow control\" \/>\n\t\t<meta property=\"og:type\" content=\"article\" \/>\n\t\t<meta property=\"og:title\" content=\"High-efficiency Vaporizer [VU-440] - LINTEC\" \/>\n\t\t<meta property=\"og:description\" content=\"This latest model adopts a highly efficient double flui\" \/>\n\t\t<meta property=\"og:url\" content=\"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/\" \/>\n\t\t<meta property=\"og:image\" content=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg\" \/>\n\t\t<meta property=\"og:image:secure_url\" content=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg\" \/>\n\t\t<meta property=\"article:published_time\" content=\"2023-07-23T13:35:37+00:00\" \/>\n\t\t<meta property=\"article:modified_time\" content=\"2024-03-25T02:55:40+00:00\" \/>\n\t\t<meta name=\"twitter:card\" content=\"summary\" \/>\n\t\t<meta name=\"twitter:title\" content=\"High-efficiency Vaporizer [VU-440] - LINTEC\" \/>\n\t\t<meta name=\"twitter:description\" content=\"This latest model adopts a highly efficient double flui\" \/>\n\t\t<meta name=\"twitter:image\" content=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg\" \/>\n\t\t<script type=\"application\/ld+json\" class=\"aioseo-schema\">\n\t\t\t{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/#breadcrumblist\",\"itemListElement\":[{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en#listItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\",\"nextItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/#listItem\",\"name\":\"Vaporizers and Vaporization Technology\"}},{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/#listItem\",\"position\":2,\"name\":\"Vaporizers and Vaporization Technology\",\"item\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/\",\"nextItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/#listItem\",\"name\":\"Vaporizer (Direct Vaporization Method)\"},\"previousItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en#listItem\",\"name\":\"Home\"}},{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/#listItem\",\"position\":3,\"name\":\"Vaporizer (Direct Vaporization Method)\",\"item\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/\",\"nextItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/#listItem\",\"name\":\"High-efficiency Vaporizer [VU-440]\"},\"previousItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/#listItem\",\"name\":\"Vaporizers and Vaporization Technology\"}},{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/#listItem\",\"position\":4,\"name\":\"High-efficiency Vaporizer [VU-440]\",\"previousItem\":{\"@type\":\"ListItem\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/#listItem\",\"name\":\"Vaporizer (Direct Vaporization Method)\"}}]},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/#organization\",\"name\":\"LINTEC\",\"description\":\"Mass Flow Controller\\uff5cVaporizer\\uff5cThe pioneer in flow control\",\"url\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"url\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/wp-content\\\/uploads\\\/2023\\\/07\\\/\\u793e\\u540d\\u82f1\\u6587\\u30ed\\u30b4-scaled.jpg\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/#organizationLogo\",\"width\":2560,\"height\":189},\"image\":{\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/#organizationLogo\"}},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/#webpage\",\"url\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/\",\"name\":\"High-efficiency Vaporizer [VU-440] - LINTEC\",\"description\":\"This latest model adopts a highly efficient double flui\",\"inLanguage\":\"ja\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/#website\"},\"breadcrumb\":{\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/liquid-vaporization\\\/vaporizer\\\/vu-440\\\/#breadcrumblist\"},\"datePublished\":\"2023-07-23T22:35:37+09:00\",\"dateModified\":\"2024-03-25T11:55:40+09:00\"},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/#website\",\"url\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/\",\"name\":\"LINTEC\",\"description\":\"Mass Flow Controller\\uff5cVaporizer\\uff5cThe pioneer in flow control\",\"inLanguage\":\"ja\",\"publisher\":{\"@id\":\"https:\\\/\\\/lintec-mfc.co.jp\\\/en\\\/#organization\"}}]}\n\t\t<\/script>\n\t\t<!-- All in One SEO -->\n\n","aioseo_head_json":{"title":"High-efficiency Vaporizer [VU-440] - LINTEC","description":"This latest model adopts a highly efficient double flui","canonical_url":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/","robots":"max-image-preview:large","keywords":"","webmasterTools":{"google-site-verification":"google-site-verification: google6b6d5b4c5998acdc.html","miscellaneous":""},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"BreadcrumbList","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/#breadcrumblist","itemListElement":[{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en#listItem","position":1,"name":"Home","item":"https:\/\/lintec-mfc.co.jp\/en","nextItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/#listItem","name":"Vaporizers and Vaporization Technology"}},{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/#listItem","position":2,"name":"Vaporizers and Vaporization Technology","item":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/","nextItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/#listItem","name":"Vaporizer (Direct Vaporization Method)"},"previousItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en#listItem","name":"Home"}},{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/#listItem","position":3,"name":"Vaporizer (Direct Vaporization Method)","item":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/","nextItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/#listItem","name":"High-efficiency Vaporizer [VU-440]"},"previousItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/#listItem","name":"Vaporizers and Vaporization Technology"}},{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/#listItem","position":4,"name":"High-efficiency Vaporizer [VU-440]","previousItem":{"@type":"ListItem","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/#listItem","name":"Vaporizer (Direct Vaporization Method)"}}]},{"@type":"Organization","@id":"https:\/\/lintec-mfc.co.jp\/en\/#organization","name":"LINTEC","description":"Mass Flow Controller\uff5cVaporizer\uff5cThe pioneer in flow control","url":"https:\/\/lintec-mfc.co.jp\/en\/","logo":{"@type":"ImageObject","url":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/#organizationLogo","width":2560,"height":189},"image":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/#organizationLogo"}},{"@type":"WebPage","@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/#webpage","url":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/","name":"High-efficiency Vaporizer [VU-440] - LINTEC","description":"This latest model adopts a highly efficient double flui","inLanguage":"ja","isPartOf":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/#website"},"breadcrumb":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/#breadcrumblist"},"datePublished":"2023-07-23T22:35:37+09:00","dateModified":"2024-03-25T11:55:40+09:00"},{"@type":"WebSite","@id":"https:\/\/lintec-mfc.co.jp\/en\/#website","url":"https:\/\/lintec-mfc.co.jp\/en\/","name":"LINTEC","description":"Mass Flow Controller\uff5cVaporizer\uff5cThe pioneer in flow control","inLanguage":"ja","publisher":{"@id":"https:\/\/lintec-mfc.co.jp\/en\/#organization"}}]},"og:locale":"ja_JP","og:site_name":"LINTEC - Mass Flow Controller\uff5cVaporizer\uff5cThe pioneer in flow control","og:type":"article","og:title":"High-efficiency Vaporizer [VU-440] - LINTEC","og:description":"This latest model adopts a highly efficient double flui","og:url":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/","og:image":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg","og:image:secure_url":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg","article:published_time":"2023-07-23T13:35:37+00:00","article:modified_time":"2024-03-25T02:55:40+00:00","twitter:card":"summary","twitter:title":"High-efficiency Vaporizer [VU-440] - LINTEC","twitter:description":"This latest model adopts a highly efficient double flui","twitter:image":"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/\u793e\u540d\u82f1\u6587\u30ed\u30b4-scaled.jpg"},"aioseo_meta_data":{"post_id":"1937","title":null,"description":null,"keywords":[],"keyphrases":{"focus":{"keyphrase":"","score":0,"analysis":{"keyphraseInTitle":{"score":0,"maxScore":9,"error":1}}},"additional":[]},"primary_term":null,"canonical_url":null,"og_title":null,"og_description":null,"og_object_type":"default","og_image_type":"default","og_image_url":null,"og_image_width":null,"og_image_height":null,"og_image_custom_url":null,"og_image_custom_fields":null,"og_video":"","og_custom_url":null,"og_article_section":null,"og_article_tags":[],"twitter_use_og":false,"twitter_card":"default","twitter_image_type":"default","twitter_image_url":null,"twitter_image_custom_url":null,"twitter_image_custom_fields":null,"twitter_title":null,"twitter_description":null,"schema":{"blockGraphs":[],"customGraphs":[],"default":{"data":{"Article":[],"Course":[],"Dataset":[],"FAQPage":[],"Movie":[],"Person":[],"Product":[],"ProductReview":[],"Car":[],"Recipe":[],"Service":[],"SoftwareApplication":[],"WebPage":[]},"graphName":"WebPage","isEnabled":true},"graphs":[]},"schema_type":"default","schema_type_options":null,"pillar_content":false,"robots_default":true,"robots_noindex":false,"robots_noarchive":false,"robots_nosnippet":false,"robots_nofollow":false,"robots_noimageindex":false,"robots_noodp":false,"robots_notranslate":false,"robots_max_snippet":"-1","robots_max_videopreview":"-1","robots_max_imagepreview":"large","priority":null,"frequency":"default","local_seo":null,"breadcrumb_settings":null,"limit_modified_date":false,"ai":null,"created":"2023-07-25 11:21:19","updated":"2026-05-15 01:50:27","seo_analyzer_scan_date":null},"aioseo_breadcrumb":"<div class=\"aioseo-breadcrumbs\"><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/lintec-mfc.co.jp\/en\" title=\"Home\">Home<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/\" title=\"Vaporizers and Vaporization Technology\">Vaporizers and Vaporization Technology<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\t<a href=\"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/\" title=\"Vaporizer (Direct Vaporization Method)\">Vaporizer (Direct Vaporization Method)<\/a>\n\t\t<\/span><span class=\"aioseo-breadcrumb-separator\">&raquo;<\/span><span class=\"aioseo-breadcrumb\">\n\t\t\tHigh-efficiency Vaporizer [VU-440]\n\t\t<\/span><\/div>","aioseo_breadcrumb_json":[{"label":"Home","link":"https:\/\/lintec-mfc.co.jp\/en"},{"label":"Vaporizers and Vaporization Technology","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/"},{"label":"Vaporizer (Direct Vaporization Method)","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/"},{"label":"High-efficiency Vaporizer [VU-440]","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/"}],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1937","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1937"}],"version-history":[{"count":3,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1937\/revisions"}],"predecessor-version":[{"id":2547,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1937\/revisions\/2547"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1442"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1937"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}