{"id":1937,"date":"2023-07-23T22:35:37","date_gmt":"2023-07-23T13:35:37","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1937"},"modified":"2024-03-25T11:55:40","modified_gmt":"2024-03-25T02:55:40","slug":"vu-440","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-440\/","title":{"rendered":"High-efficiency Vaporizer [VU-440]"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<p>This latest model adopts a highly efficient double fluid nozzle structure, expands the vaporization chamber, and suppresses unvaporized gas by improving the vaporization outlet.<\/p>\n\n\n\n<p>Compared to the VU-450, this vaporizer has improved convection time and heat exchange area due to the enlarged volume of the vaporization chamber. Achieves high flow vaporization.<\/p>\n\n\n\n<p>By lengthening the distance to the gas outlet, the risk of unvaporized mist emission is suppressed.<\/p>\n\n\n\n<p>Suitable for low vapor pressure precursors, as well as for high flow rate vaporization of Low-k & High-k precursors, various metals, etc.<\/p>\n\n\n\n<p>Because it is a valve-integrated vaporizer, it can be combined with the LM-3000L to control the liquid flow rate near the vaporizer. This way, vaporization flow rate control with high responsiveness is possible.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"237\" height=\"400\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-0440N.jpg\" alt=\"High Efficiency Vaporizer [VU-440]\" class=\"wp-image-1885\" srcset=\"https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/VU-0440N.jpg 237w, https:\/\/ld7wbevg6gkl.cdn.shift8web.com\/en\/wp-content\/uploads\/2023\/07\/VU-0440N-178x300.jpg 178w\" sizes=\"(max-width: 237px) 100vw, 237px\" \/><figcaption class=\"wp-element-caption\">High Efficiency Vaporizer [VU-440]<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h2>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Highly efficient vaporization<\/li>\n\n\n\n<li>Easy maintenance<\/li>\n\n\n\n<li>Close proximity valve structure<\/li>\n\n\n\n<li>Increase the distance to the heating outlet<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Example of Use<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">Vaporization supply of semiconductor materials (CVD, ALD)<\/h3>\n\n\n\n<p>By enlarging the vaporization chamber, the mist atomized from the central double fluid nozzle spreads more compared the VU-450. By increasing the power of heater, it is possible to vaporize higher flow rates of liquids, 30g\/min in TEOS or 5g\/min in H2O conversion at high stability.<\/p>\n\n\n\n<figure class=\"wp-block-table epb-margin-top__8\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">Max. temperature<\/th><th class=\"has-text-align-center\" data-align=\"center\">Carrier gas flow<\/th><th class=\"has-text-align-center\" data-align=\"center\">Max TEOS vaporization<br>Max H2O vaporization<\/th><th class=\"has-text-align-center\" data-align=\"center\">Seal materials<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">200\u2103<\/td><td class=\"has-text-align-center\" data-align=\"center\">0.8~130SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">30g\/min<br>5g\/min<\/td><td class=\"has-text-align-center\" data-align=\"center\">Au,Karlez\u00ae<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-440-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"VU-440 Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-440-Series.pdf\">VU-440 Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-440-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-b66f3d78-6f2d-4fc8-8b4b-60630ad02073\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>This latest model adopts a highly efficient double fluid nozzle structure, expands the vaporization chamber, a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1442,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1937"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1937"}],"version-history":[{"count":3,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1937\/revisions"}],"predecessor-version":[{"id":2547,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1937\/revisions\/2547"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1442"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1937"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}