{"id":1827,"date":"2023-07-23T14:53:27","date_gmt":"2023-07-23T05:53:27","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1827"},"modified":"2024-03-25T10:58:38","modified_gmt":"2024-03-25T01:58:38","slug":"mc-7000","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/mass-flow-controller\/gas\/mc-7000\/","title":{"rendered":"Fast Response Mass Flow Controller"},"content":{"rendered":"\n<p>Ultra high-speed mass flow controller with response time of 200msec.<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<h2 class=\"wp-block-heading\">MC-7000 Series<\/h2>\n\n\n\n<p>Achieves high-speed flow control of 200msec (typical) by using a thermal sensor. By using the Lintec\u2019s unique non-contact, thermal flow rate sensor and piezo control valve, it\u2019s possible to control the flow of corrosive gases with ultra-high speed.<\/p>\n\n\n\n<p>This product offers \u00b11.0% S.P. high accuracy flow rate control, and has DeviceNet or EtherCAT digital communication interface available for selection.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"430\" height=\"100\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/Device-Net-EtherCAT-1.jpg\" alt=\"\" class=\"wp-image-1832\" srcset=\"https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/Device-Net-EtherCAT-1.jpg 430w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/Device-Net-EtherCAT-1-300x70.jpg 300w\" sizes=\"(max-width: 430px) 100vw, 430px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><img decoding=\"async\" loading=\"lazy\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-7000.jpg\" alt=\"\" class=\"wp-image-1828\" width=\"368\" height=\"252\" srcset=\"https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/MC-7000.jpg 583w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/MC-7000-300x206.jpg 300w\" sizes=\"(max-width: 368px) 100vw, 368px\" \/><figcaption class=\"wp-element-caption\">MC-7000<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-6\">\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Ultra high-speed flow control 200msec<\/li>\n\n\n\n<li>Accuracy \u00b11%S.P.<\/li>\n\n\n\n<li>Operating temperature 5 to 50\u00b0C<\/li>\n\n\n\n<li>Metal seal<\/li>\n\n\n\n<li>Clean (zero particle structure)<\/li>\n\n\n\n<li>Ambient temperature sensor<\/li>\n\n\n\n<li>EtherCAT communication<\/li>\n\n\n\n<li>DeviceNet\u2122 communication<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<h3 class=\"wp-block-heading\">Ultra high-speed flow control<\/h3>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"767\" height=\"447\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-7000-Data.png\" alt=\"\" class=\"wp-image-1830\" srcset=\"https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/MC-7000-Data.png 767w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/MC-7000-Data-300x175.png 300w\" sizes=\"(max-width: 767px) 100vw, 767px\" \/><figcaption class=\"wp-element-caption\">Full close to control<\/figcaption><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"755\" height=\"433\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/12\/2cf9c0bfd6be72f93c8faef054243e1a-1.png\" alt=\"\" class=\"wp-image-2191\" srcset=\"https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/12\/2cf9c0bfd6be72f93c8faef054243e1a-1.png 755w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/12\/2cf9c0bfd6be72f93c8faef054243e1a-1-300x172.png 300w\" sizes=\"(max-width: 755px) 100vw, 755px\" \/><figcaption class=\"wp-element-caption\">Respones time of valve<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Example of Use<\/h3>\n\n\n\n<h3 class=\"wp-block-heading\">High-speed etching process<\/h3>\n\n\n\n<p class=\"epb-margin-top__8\">In semiconductor manufacturing process, there is a need to improve the throughput in parallel with miniaturization. Even for mass flow controllers that control the flow rate of reactant gases, there is an increasing demand for shorter flow rate control start (rise) times. The ultra high-speed mass flow controller [MC-7000] is a non-contact thermal flow sensor that does not contact the flow sensor and the flow measuring gas and achieving an ultra-high-speed response of 200 msec. Since it is a non-contact type, high-speed flow rate control is possible for measuring the flow rate of corrosive gases.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Specification Table<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table><tbody><tr><td>Temperature<\/td><td>Minimum differential pressure<\/td><td>Maximum differential pressure<\/td><td>Accuracy<\/td><td>Flow rate control range<\/td><td>Minimum flow rate<\/td><td>Maximum flow rate<\/td><td>Seal material<\/td><\/tr><tr><td>5\uff5e50\u2103<\/td><td>50kPa<\/td><td>300kPa<\/td><td>\u00b11%S.P.<\/td><td>2~100%F.S.<\/td><td>5SCCM<\/td><td>20SLM<\/td><td>Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<figure class=\"wp-block-table\"><table><thead><tr><th>Model<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-7100C<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-7200C<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-7100D<\/th><th class=\"has-text-align-center\" data-align=\"center\">MC-7200D<\/th><\/tr><\/thead><tbody><tr><td>Flow rate in Nitrogen(Full scale)<\/td><td class=\"has-text-align-center\" data-align=\"center\">10 \uff5e 5,000SCCM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e20SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">10 \uff5e 5,000SCCM<\/td><td class=\"has-text-align-center\" data-align=\"center\">\uff5e20SLM<\/td><\/tr><tr><td>Flow rate control range<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"4\">2 \uff5e 100% F.S.<\/td><\/tr><tr><td>Accuracy<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"4\">100% F.S. \uff5e 25% F.S. \u00b11.0% S.P.<br>25% F.S. \uff5e 2% F.S. \u00b10.25% F.S.<\/td><\/tr><tr><td>Response time<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"4\">0.2sec<\/td><\/tr><tr><td>Operating differential pressure<\/td><td class=\"has-text-align-center\" data-align=\"center\">50 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><td class=\"has-text-align-center\" data-align=\"center\">50 \uff5e 300kPa<\/td><td class=\"has-text-align-center\" data-align=\"center\">Please check our catalog.<\/td><\/tr><tr><td>Temperature<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"4\">5 \uff5e 50\u2103<\/td><\/tr><tr><td>Seal materials<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">SUS316L<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">Au<\/td><\/tr><tr><td>Digital interface<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">EtherCAT\u00ae<\/td><td class=\"has-text-align-center\" data-align=\"center\" colspan=\"2\">DeviceNetTM<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-7000-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"MC-7000 Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-fe13fc29-6110-4de1-80b8-23d973411f39\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-7000-Series.pdf\">MC-7000 Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/MC-7000-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-fe13fc29-6110-4de1-80b8-23d973411f39\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Ultra high-speed mass flow controller with response time of 200msec. MC-7000 Series Achieves high-speed flow c [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":34,"menu_order":1,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1827"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1827"}],"version-history":[{"count":14,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1827\/revisions"}],"predecessor-version":[{"id":2532,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1827\/revisions\/2532"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/34"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1827"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}