{"id":1521,"date":"2023-07-15T23:59:28","date_gmt":"2023-07-15T14:59:28","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1521"},"modified":"2024-03-25T17:11:25","modified_gmt":"2024-03-25T08:11:25","slug":"heating-filter-vf-0201n","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/gas-heater\/heating-filter-vf-0201n\/","title":{"rendered":"Heating filter [VF-0201N]"},"content":{"rendered":"\n<p>High temperature filter with integrated 0.1 \u03bcm filter and a heater.<\/p>\n\n\n\n<div class=\"wp-block-columns has-2-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<p>Designed for use with liquefied gas in the semiconductor manufacturing process, all wetted parts are made of SUS316L. The pressure loss is minimal due to Lintec&#8217;s original low pressure loss design.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Feature<\/h2>\n\n\n\n<ul>\n<li> 0.1\u00b5m filtration accuracy<\/li>\n\n\n\n<li>Max200\u2103<\/li>\n\n\n\n<li>All-metal clean construction<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lintec-mfc.co.jp\/wp-content\/uploads\/2020\/04\/\u30ac\u30b9\u52a0\u71b1\u30d5\u30a3\u30eb\u30bf.png\" alt=\"\" class=\"wp-image-4806\"\/><figcaption class=\"wp-element-caption\">VF-0201N<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Example of use<\/h2>\n\n\n\n<p>The heating filter is usually installed downstream the vaporization system to remove particles and mist, which may lead to wafer defect.<\/p>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VF-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"VF Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-eece87bf-38d5-4198-b5e6-863084feeadb\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VF-Series.pdf\">VF Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VF-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-eece87bf-38d5-4198-b5e6-863084feeadb\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>High temperature filter with integrated 0.1 \u03bcm filter and a heater. Designed for use with liquefied gas in the [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1494,"menu_order":7,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1521"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1521"}],"version-history":[{"count":6,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1521\/revisions"}],"predecessor-version":[{"id":2561,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1521\/revisions\/2561"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1494"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1521"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}