{"id":1521,"date":"2023-07-15T23:59:28","date_gmt":"2023-07-15T14:59:28","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1521"},"modified":"2024-03-25T17:11:25","modified_gmt":"2024-03-25T08:11:25","slug":"heating-filter-vf-0201n","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/gas-heater\/heating-filter-vf-0201n\/","title":{"rendered":"Heating filter [VF-0201N]"},"content":{"rendered":"\n<p>High temperature filter with integrated 0.1 \u03bcm filter and a heater.<\/p>\n\n\n\n<div class=\"wp-block-columns has-2-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<p>Designed for use with liquefied gas in the semiconductor manufacturing process, all wetted parts are made of SUS316L. The pressure loss is minimal due to Lintec\u2019s original low pressure loss design.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Feature<\/h2>\n\n\n\n<ul>\n<li> 0.1\u00b5m filtration accuracy<\/li>\n\n\n\n<li>Max200\u2103<\/li>\n\n\n\n<li>All-metal clean construction<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lintec-mfc.co.jp\/wp-content\/uploads\/2020\/04\/\u30ac\u30b9\u52a0\u71b1\u30d5\u30a3\u30eb\u30bf.png\" alt=\"\" class=\"wp-image-4806\"\/><figcaption class=\"wp-element-caption\">VF-0201N<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Example of use<\/h2>\n\n\n\n<p>The heating filter is usually installed downstream the vaporization system to remove particles and mist, which may lead to wafer defect.<\/p>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VF-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"VF Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-eece87bf-38d5-4198-b5e6-863084feeadb\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VF-Series.pdf\">VF Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VF-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-eece87bf-38d5-4198-b5e6-863084feeadb\">Download<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>High temperature filter with integrated 0.1 \u03bcm filter and a heater. Designed for use with liquefied gas in the [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1494,"menu_order":7,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1521"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1521"}],"version-history":[{"count":6,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1521\/revisions"}],"predecessor-version":[{"id":2561,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1521\/revisions\/2561"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1494"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1521"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}