{"id":1481,"date":"2023-07-15T21:06:05","date_gmt":"2023-07-15T12:06:05","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1481"},"modified":"2024-03-15T13:17:14","modified_gmt":"2024-03-15T04:17:14","slug":"bubbling","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/bubbling\/","title":{"rendered":"Bubbling method"},"content":{"rendered":"\n

A method in which the carrier gas is flown into the liquid tank and the vaporized precursor gas is transported to the chamber together with the carrier gas.<\/p>\n\n\n\n

Bubbling method principle<\/h2>\n\n\n\n
\n
\n
\"Bubbling
Bubbling method<\/figcaption><\/figure>\n<\/div>\n\n\n\n
\n

The concentration of liquefied gas is generally calculated as follows: vapor pressure (partial pressure) \/ tank pressure (total pressure) x 100 = liquefied gas concentration (%).<\/p>\n\n\n\n

The flow rate of liquefied gas can be calculated as follows: liquefied gas concentration x carrier gas flow rate.
However, it is not easy to maintain a constant vapor pressure in a liquid tank where the carrier gas keeps flowing and the liquid temperature and surface area keep changing due to continuous vaporization.<\/p>\n<\/div>\n<\/div>\n\n\n\n

Therefore, the direct vaporization method<\/span><\/a> and the baking method<\/span><\/a> were developed.<\/p>\n\n\n\n

Features<\/h3>\n\n\n\n
    \n
  • Can be used at low or atmospheric pressure<\/li>\n\n\n\n
  • Any liquid type can be used <\/li>\n<\/ul>\n\n\n\n

    Bubbling method related products<\/h3>\n\n\n\n
    \n
    <\/div>\n\n\n\n
    <\/div>\n\n\n\n
    <\/div>\n\n\n\n
    <\/div>\n\n\n\n
    <\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

    A method in which the carrier gas is flown into the liquid tank and the vaporized precursor gas is transported […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1435,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":{"emanon_ad_label_edit":"initial","emanon_hide_header":"","emanon_hide_header_menu":"","emanon_hide_header_menu_sp":"","emanon_hide_featured_image":"0","emanon_disabled_overlay":"0","emanon_hide_title":"0","emanon_hide_sidebar":"0","emanon_hide_breadcrumb":"0","emanon_hide_toc":"0","emanon_hide_sns":"0","emanon_hide_follow":"0","emanon_hide_ad":"0","emanon_disabled_background_color":"0","emanon_hide_content_margin_top":"","emanon_hide_content_margin_bottom":"0","emanon_hide_left_right_margin_sp":"0","emanon_hide_footer_section":"0","emanon_hide_footer":"","emanon_hide_fixed_sidebar_menu":"","emanon_hide_floating_hamburger_menu":"0","emanon_hide_hamburger_menu_pc":"","emanon_hide_hamburger_menu_sp_tb":"","emanon_hide_fixed_footer_menu":"0","emanon_one_column_width":"","emanon_subtitle":"","emanon_cta_cv_type":"cta-cv-not","emanon_cta_floating_cv_type":"cta-cv-not","emanon_cta_newsletter_cv_type":"cta-cv-not","emanon_cta_id":"","emanon_cta_floating_id":"","emanon_cta_newsletter_id":"","emanon_noindex":"0","emanon_nofollow":"0","emanon_meta_description":"","get_emanon_structured_data_profile_page_name":[],"emanon_custom_footer_shortcode":"","emanon_custom_header_shortcode":"","footnotes":""},"class_list":["post-1481","page","type-page","status-publish","hentry"],"aioseo_notices":[],"aioseo_head":"\n\t\t\n\t\n\t\n\t\n\t\n\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t