{"id":1481,"date":"2023-07-15T21:06:05","date_gmt":"2023-07-15T12:06:05","guid":{"rendered":"https:\/\/lintec-mfc.co.jp\/en\/?page_id=1481"},"modified":"2024-03-15T13:17:14","modified_gmt":"2024-03-15T04:17:14","slug":"bubbling","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/bubbling\/","title":{"rendered":"Bubbling method"},"content":{"rendered":"\n<p>A method in which the carrier gas is flown into the liquid tank and the vaporized precursor gas is transported to the chamber together with the carrier gas.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Bubbling method principle<\/h2>\n\n\n\n<div class=\"wp-block-columns has-2-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"882\" height=\"400\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/Bubbling-method.jpg\" alt=\"Bubbling method\" class=\"wp-image-1599\" srcset=\"https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/Bubbling-method.jpg 882w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/Bubbling-method-300x136.jpg 300w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/Bubbling-method-768x348.jpg 768w\" sizes=\"(max-width: 882px) 100vw, 882px\" \/><figcaption class=\"wp-element-caption\">Bubbling method<\/figcaption><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<p>The concentration of liquefied gas is generally calculated as follows: vapor pressure (partial pressure) \/ tank pressure (total pressure) x 100 = liquefied gas concentration (%).<\/p>\n\n\n\n<p>The flow rate of liquefied gas can be calculated as follows: liquefied gas concentration x carrier gas flow rate.<br>However, it is not easy to maintain a constant vapor pressure in a liquid tank where the carrier gas keeps flowing and the liquid temperature and surface area keep changing due to continuous vaporization.<\/p>\n<\/div>\n<\/div>\n\n\n\n<p>Therefore, <a href=\"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/\" title=\"\"><span class=\"epb-underline\">the direct vaporization method<\/span><\/a> and <a href=\"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/baking\/\" title=\"\"><span class=\"epb-underline\">the baking method<\/span><\/a> were developed.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Features<\/h3>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Can be used at low or atmospheric pressure<\/li>\n\n\n\n<li>Any liquid type can be used <\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Bubbling method related products<\/h3>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-9\">\n<div class=\"wp-block-column is-layout-flow\"><\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\"><\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\"><\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\"><\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\"><\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>A method in which the carrier gas is flown into the liquid tank and the vaporized precursor gas is transported [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1435,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1481"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1481"}],"version-history":[{"count":7,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1481\/revisions"}],"predecessor-version":[{"id":2498,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1481\/revisions\/2498"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1435"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1481"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}