Simulation of a liquid atomization via a double fluid nozzle<\/figcaption><\/figure>\n\n\n\nVenturi effect occurs in the double fluid nozzle, which combines the carrier gas and flow-controlled liquid nozzles. The liquid droplets are sprayed straight down the vaporization chamber, which ensures a stable and constant liquid supply, even at lowest flow rates. Atomized mist is then efficiently vaporized by being exposed to radiant heat and by contacting with the inner walls of the vaporization chamber.<\/p>\n<\/div>\n<\/div>\n\n\n\n
Low Flow Rate Vaporization<\/strong><\/p>\n\n\n\nFlow flow rate control can be very tricky, and often requires precise adjustment of the control valve, a piezoelectric actuator, and minimalization if the dead volume between the fluid control part and the vaporization chamber.<\/p>\n\n\n\n
High 300\u2103 Operational Temperature<\/strong><\/p>\n\n\n\nThin film formation processes, such as CVD and ALD, often require vapor supply of organometallic precursors with low vapor pressure and higher than 200\u2103 boiling point. Lintec\u2019s vaporizers are remarkable\u00a0due\u00a0to\u00a0their ease of maintenance and heat resistance, which are achieved through the use of metal seal materials and heat-resistant structure.<\/p>\n\n\n\n
Maintainability<\/strong><\/p>\n\n\n\nA vaporizer\u2019s life cycle highly depends on the physical properties and purity of the precursor material. Thus, periodic maintenance is sometimes deemed necessary, depending on the vaporized precursor material. Lintec\u2019s vaporizers are designed to enable easy maintenance and reduce the maintenance costs.<\/p>\n\n\n\n
Close Proximity Valve Structure<\/strong><\/p>\n\n\n\nThe control valve of the vaporizer is located in close proximity to the vaporization chamber and receives a flow control signal from the liquid flow meter. This construction minimizes the dead volume, which improves the response speed of controlling the flow rate of the liquid entering the vaporization chamber.<\/p>\n\n\n\n
Multiple Liquid Flow Control Valves<\/strong><\/p>\n\n\n\nIt is possible to vaporize numerous liquids simultaneously or one-by-one by installing multiple liquid flow control valves close to the vaporization chamber.<\/p>\n\n\n\n
Valveless Construction<\/strong><\/p>\n\n\n\nLintec also provides vaporizers with a valveless construction, i.e., without a liquid flow control valve. It is possible to use such vaporizers with liquid mass flow controllers already at hand, for example, as a set with Coriolis sensor mass flow controllers that don\u2019t require C.F. calculation.<\/p>\n\n\n\n
High Flow Rate Vaporization<\/strong><\/p>\n\n\n\nHigh flow rate vaporization is achieved by a unique extended vaporization chamber design that maximizes the effect of radiant heat.<\/p>\n\n\n\n
Compact design<\/strong><\/p>\n\n\n\n\n
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Lintec provides compact vaporizers that only require 78mm of face-to-face space. Even when connected in chain with a mass flow meter, this design requires only 203mm in total.<\/p>\n<\/div>\n\n\n\n
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This method utilizes a liquid mass flow meter to measure the liquid mass flow rate and a vaporizer to control […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1435,"menu_order":1,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1442"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=1442"}],"version-history":[{"count":57,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1442\/revisions"}],"predecessor-version":[{"id":2679,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1442\/revisions\/2679"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1435"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=1442"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
![\"Direct](\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/Direct-vaporization-method.jpg\")