{"id":137,"date":"2016-12-01T16:19:08","date_gmt":"2016-12-01T07:19:08","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=137"},"modified":"2024-03-04T10:55:45","modified_gmt":"2024-03-04T01:55:45","slug":"im-10","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/home\/accessory\/im-10\/","title":{"rendered":"MFC inline monitor [IM-10]"},"content":{"rendered":"\n
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This is a dedicated operation check device for mass flow controllers that can check the voltage status of the set voltage and output voltage with the MFC.<\/p>\n\n\n\n

It also has a built-in low-power voltmeter to monitor whether the signals from the device and the signals from the MFC to the device are normal, making it easy to find the cause of malfunctioning.<\/p>\n<\/div>\n\n\n\n

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MFC in-line monitor<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n

Connection example<\/h2>\n\n\n\n
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Connect this device between the mass flow controller and the tool power supply, or between the mass flow controller and the power supply\/read-out unit for MFC (RP-310) to measure and check various signals and voltages.<\/p>\n<\/div>\n<\/div>\n\n\n\n

Measuring Functions<\/h2>\n\n\n\n