{"id":110,"date":"2016-12-01T16:07:59","date_gmt":"2016-12-01T07:07:59","guid":{"rendered":"http:\/\/ae1371jxuo.smartrelease.jp\/?page_id=110"},"modified":"2024-03-25T11:50:10","modified_gmt":"2024-03-25T02:50:10","slug":"vu-430","status":"publish","type":"page","link":"https:\/\/lintec-mfc.co.jp\/en\/liquid-vaporization\/vaporizer\/vu-430\/","title":{"rendered":"High-efficiency vaporizer [VU-430]"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-3\">\n<div class=\"wp-block-column is-layout-flow\">\n<p>Highly efficient vaporizer with two-fluid nozzle (liquid nozzle and carrier gas nozzle).<\/p>\n\n\n\n<p>A liquid nozzle and a carrier gas nozzle (0.05~4 SLM) merge just before the vaporization chamber to atomize the liquid into fine particles. Highly efficient liquid vaporization is achieved by radiation heat from the atomized liquid.<\/p>\n\n\n\n<p>A liquid control valve on top of the vaporization chamber receives flow signals from a liquid mass flow meter (LM-3000L) and adjusts the valve opening degree. By controlling the flow rate, stable vaporization supply is possible.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" loading=\"lazy\" width=\"181\" height=\"399\" src=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-0430N.jpg\" alt=\"High-efficiency vaporizer [VU-430]\" class=\"wp-image-1884\" srcset=\"https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/VU-0430N.jpg 181w, https:\/\/ld7wbevg6gkl.wpcdn.shift8cdn.com\/en\/wp-content\/uploads\/2023\/07\/VU-0430N-136x300.jpg 136w\" sizes=\"(max-width: 181px) 100vw, 181px\" \/><figcaption class=\"wp-element-caption\">High-efficiency vaporizer [VU-430]<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\"><span data-color=\"#ff6900\" class=\"vk_highlighter\" style=\"background: linear-gradient(transparent 60%,rgba(255, 105, 0, 0.7) 0);\">Feature<\/span><\/h2>\n\n\n\n<ul class=\"epb-margin-top__8\">\n<li>Highly efficient vaporization<\/li>\n\n\n\n<li>Easy maintenance<\/li>\n\n\n\n<li>Close proximity valve structure<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Example of Use<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">Vaporization of low vapor pressure materials<\/h3>\n\n\n\n<p>Due to heat-resistant structure with a maximum temperature of 200\u2103 and a double fluid nozzle, highly efficient and stable liquid vaporization supply can be realized for such materials as Low-K, High-k and various metals etc., and even for the low-vapor pressure materials. Precise temperature control is possible by dividing the temperature control of the heater block into the side and bottom. Delicate temperature control is possible even for materials that are subject to denaturation by heat.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Specification Table<\/h2>\n\n\n\n<figure class=\"wp-block-table epb-margin-top__8\"><table><thead><tr><th class=\"has-text-align-center\" data-align=\"center\">Max. temperature<\/th><th class=\"has-text-align-center\" data-align=\"center\">Carrier gas flow<\/th><th class=\"has-text-align-center\" data-align=\"center\">Max TEOS vaporization<br>Max H2O vaporization<\/th><th class=\"has-text-align-center\" data-align=\"center\">Seal materials<\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-center\" data-align=\"center\">200\u2103<\/td><td class=\"has-text-align-center\" data-align=\"center\">0.05~4SLM<\/td><td class=\"has-text-align-center\" data-align=\"center\">10g\/min<br>1g\/min<\/td><td class=\"has-text-align-center\" data-align=\"center\">Au<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div class=\"wp-block-file\"><object class=\"wp-block-file__embed\" data=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-430A-Series.pdf\" type=\"application\/pdf\" style=\"width:100%;height:600px\" aria-label=\"VU-430A Series\u306e\u57cb\u3081\u8fbc\u307f\u3002\"><\/object><a id=\"wp-block-file--media-323f5746-0387-4417-9b76-3385adcecaa1\" href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-430A-Series.pdf\">VU-430A Series<\/a><a href=\"https:\/\/lintec-mfc.co.jp\/en\/wp-content\/uploads\/2023\/07\/VU-430A-Series.pdf\" class=\"wp-block-file__button wp-element-button\" download aria-describedby=\"wp-block-file--media-323f5746-0387-4417-9b76-3385adcecaa1\">\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Highly efficient vaporizer with two-fluid nozzle (liquid nozzle and carrier gas nozzle). A liquid nozzle and a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":1442,"menu_order":2,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/110"}],"collection":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/comments?post=110"}],"version-history":[{"count":14,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/110\/revisions"}],"predecessor-version":[{"id":2541,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/110\/revisions\/2541"}],"up":[{"embeddable":true,"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/pages\/1442"}],"wp:attachment":[{"href":"https:\/\/lintec-mfc.co.jp\/en\/wp-json\/wp\/v2\/media?parent=110"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}